首页|期刊导航|Industrial Chemistry & Materials|Silane production from the dichlorosilane byproduct of the Siemens process:a comparative study with the trichlorosilane route
Industrial Chemistry & Materials2025,Vol.3Issue(5):P.578-586,9.DOI:10.1039/d5im00040h
Silane production from the dichlorosilane byproduct of the Siemens process:a comparative study with the trichlorosilane route
摘要
关键词
Silane/Dichlorosilane/Reactive distillation/Disproportionation/Process simulation分类
化学化工引用本文复制引用
Zi-Yi Chi,Peng-Bo Bai,Wen-De Xiao,Ming-Dong Zhou,Xue-Gang Li..Silane production from the dichlorosilane byproduct of the Siemens process:a comparative study with the trichlorosilane route[J].Industrial Chemistry & Materials,2025,3(5):P.578-586,9.基金项目
the National Natural Science Foundation of China(No.22378257)for supporting this work. (No.22378257)