集成电路与嵌入式系统2026,Vol.26Issue(2):14-23,10.DOI:10.20193/j.ices2097-4191.2025.0107
GA-JIT Scheduler:严格JIT约束下的晶圆制造动态调度算法
GA-JIT scheduler:a dynamic scheduling algorithm for wafer manufacturing under strict JIT constraints
刘鸣蒹 1颜孔汗 1王嘉奇 1冯超超 2隋兵才2
作者信息
- 1. 国防科技大学 计算机学院,长沙 410073
- 2. 国防科技大学 计算机学院,长沙 410073||国防科技大学 先进微处理器芯片与系统重点实验室,长沙 410073
- 折叠
摘要
Abstract
Wafer manufacturing involves multi-module coordination and strong temporal constraints.Traditional scheduling methods struggle in high-mix production scenarios due to poor adaptability and difficulty in handling complex constraints.To address the dynamic scheduling challenges under strict Just-in-Time(JIT)constraints,this paper proposes an efficient dynamic scheduling scheme named GA-JIT Scheduler,based on a genetic algorithm.The approach models equipment and processes using directed graphs,encoding JIT and other complex constraints into a fitness function.By integrating time-window detection and genetic evolution strategies,a"percep-tion-decision-execution"closed-loop tuning mechanism is constructed to enable rapid responses to dynamic disturbances.This paper veri-fies the GA-JIT Scheduler using 4 differentiated scheduling tasks from the"9th National Innovation Competition(BeiFang HuaChuang Cup)",with the measured solution times of the four tasks being 93 256.5 s,15 311.5 s,13 013.5 s,and 18 470 s respectively.The algorithm satisfies constraints such as equipment exclusivity and JIT(movement≤30 s,residence time≤15 s),adapts to multiple sce-narios,verifies its engineering applicability and scalability in the dynamic scheduling of wafer manufacturing under strict JIT constraints,and provides a feasible solution for wafer manufacturing with high mix and strong temporal constraints.关键词
晶圆制造/动态调度/准时制生产/遗传算法/半导体设备调度Key words
wafer manufacturing/dynamic scheduling/just-in-time production/genetic algorithm/semiconductor equipment scheduling分类
信息技术与安全科学引用本文复制引用
刘鸣蒹,颜孔汗,王嘉奇,冯超超,隋兵才..GA-JIT Scheduler:严格JIT约束下的晶圆制造动态调度算法[J].集成电路与嵌入式系统,2026,26(2):14-23,10.