量子电子学报2026，Vol.43Issue(1)：38-48,11.DOI:10.3969/j.issn.1007-5461.2026.01.003
基于微焦点光源的X射线椭球聚焦镜设计
Design of X-ray ellipsoidal focusing mirror based on micro-focus light source
摘要
Abstract
X-ray ellipsoidal focusing mirror is a key device in systems such as microscopic imaging,microbeam diffraction,synchrotron radiation light source,and so on.Based on Hamamatsu L9421-02 micro-focus light source,an ellipsoidal focusing mirror suitable for table-level X-ray instruments is designed in this work.8 keV is selected as the design energy for the mirror.According to the characteristics of reflection,focusing and manufacturing process,the size range and design requirements of the ellipsoidal mirror are analyzed,and a dimension design flow based on parameter scanning is proposed.Then,by using the equivalent interface method,the X-ray reflectivity of the optical thin film system is studied for the ellipsoidal mirror,and the structure of the reflecting film is determined.Finally,the optimal design schemes of two groups of single-layer gold film ellipsoidal mirrors and two groups of tungsten-silicon multilayer film ellipsoidal mirrors are proposed,with a length of 50 mm and a diameter of about 2-10 mm.The design of the size and the films is the prerequisite for the manufacturing,testing and instrument development of ellipsoidal mirrors,and the complete design idea also offers valuable reference for the personalized customization of ellipsoidal mirrors.关键词
基础光学/X射线/旋转椭球聚焦镜/光学设计/掠入射系统/X射线反射率Key words
basic optics/X-ray/rotating ellipsoidal focusing mirror/optical design/grazing incidence system/X-ray reflectivity分类
数理科学引用本文复制引用
黄子文,赵帅,秦东旭,陈天赐,杨煜,王克逸..基于微焦点光源的X射线椭球聚焦镜设计[J].量子电子学报,2026,43(1):38-48,11.基金项目
同步辐射联合基金(KY2090000080),安徽省自然科学基金资助项目(2308085QF208) （KY2090000080）
