量子电子学报2026，Vol.43Issue(1)：49-58,10.DOI:10.3969/j.issn.1007-5461.2026.01.004
F/0.58高次非球面的自准校正补偿检测方法研究
Study on autocollimation correction compensation testing method for F/0.58 high order aspherical surface mirrors
刘天 1胡明勇 2褚奇 1袁梦雨 1封志伟1
作者信息
- 1. 合肥工业大学仪器科学与光电工程学院,安徽 合肥 230009
- 2. 合肥工业大学光电技术研究院,安徽 合肥 230009
- 折叠
摘要
Abstract
To address the challenges of processing and testing high order aspherical surface with large aperture and large relative aperture,an autocollimation correction compensation testing method similar to the Offner structure is proposed.The method involves coating a semi-transparent and semi-reflective film on the side of the compensator that is far away from the aspherical reflector to be tested.By repeatedly using the compensator,the autocollimation correction function of the light can be achieved,thus completing the full aperture testing of large relative aperture aspherical surfaces.Firstly,based on the three-level aberration theory,the formula for calculating the initial structural parameters of the optical testing system is deduced.And then,the simulation and design of the optical testing system for the high-order aspherical surface with an effective aperture of 712 mm and F/0.58 concave are carried out,and it shows that the peak to valley(PV)value of the residual wave aberration after system optimization is 0.0656 λ,and the root mean square(RMS)value is 0.0104 λ(λ=632.8 nm).Finally,an analysis of the actual testing situation is conducted,and it is found that the designed autocollimation correction compensation testing system can meet the requirements of the actual testing.This work demonstrates that the proposed autocollimation correction compensation testing method similar to the Offner structure can solve the problem of compensation testing for large relative aperture high order aspherical surfaces.关键词
光学非球面检测/补偿器设计/自准校正补偿检测/大相对口径Key words
optical aspheric testing/compensator design/autocollimation correction compensation testing/large relative aperture分类
数理科学引用本文复制引用
刘天,胡明勇,褚奇,袁梦雨,封志伟..F/0.58高次非球面的自准校正补偿检测方法研究[J].量子电子学报,2026,43(1):49-58,10.
