人工晶体学报2026，Vol.55Issue(1)：29-36,8.DOI:10.16553/j.cnki.issn1000-985x.2025.0150
基于多物理场仿真的YIG薄膜液相外延生长工艺优化的研究
Optimization of LPE Growth Process of YIG Films Based on Multi-Physics Field Simulation
摘要
Abstract
With the development of optical communication technology and photonic chips,yttrium iron garnet(YIG)crystals have shown broad application prospects in optical communication systems,magneto-optical isolators and other fields due to excellent magneto-optical properties.Liquid phase epitaxy(LPE)method,as a primary technique for preparing YIG films,has attracted significant attention.The key to growing YIG films via LPE lies in the precise control of solute transport,in which uniform flow field distribution and uniform temperature field environment are critical conditions to achieve consistent mass transfer.Therefore,it is of great research importance to regulate process parameters to stabilize the temperature field and flow field,thereby facilitating the growth of high-quality YIG films.In this paper,based on the method of multi-physics field simulation,a temperature-flow coupling model of YIG crystal grown by LPE method was established.The influence of crucible rotation on melt flow,axial temperature gradient and crystal growth rate was revealed by numerical simulation.Through systematic simulation and optimization,a set of optimal process parameters are obtained:the crucible rotation speed is controlled at 55～60 r/min,which could significantly suppress the disturbance of flow field and temperature field,thus maintaining the stability of the solid-liquid interface and providing favorable conditions for the high-quality epitaxial growth of YIG crystals.This study offers valuable theoretical insights and novel strategies for process optimization of controllable growth of complex oxide crystals.关键词
晶体生长/液相外延/钇铁石榴石/温度-流动耦合/温场/流场Key words
crystal growth/liquid phase epitaxy/yttrium iron garnet/temperature-flow coupling/temperature field/flow field分类
数理科学引用本文复制引用
吕搏闻,武珈羽,张晗旭,朱森寅,张伶莉,张宇民,王先杰,宋波..基于多物理场仿真的YIG薄膜液相外延生长工艺优化的研究[J].人工晶体学报,2026,55(1):29-36,8.基金项目
国家杰出青年科学基金(52225201) （52225201）
国家自然科学基金(52072085) （52072085）
激光空间信息全国重点实验室基金(LSI2024JCKY01) （LSI2024JCKY01）
