无机材料学报2026，Vol.41Issue(1)：55-62,中插4,9.DOI:10.15541/jim20250137
Ce0.9Fe3CoSb12薄膜的磁控溅射制备及其热电与传感性能研究
Fabrication and Thermoelectric Performance of Ce0.9Fe3CoSb12 Thin Films via Magnetron Sputtering for Flexible Thermoelectric and Sensing Applications
摘要
Abstract
Skutterudite-based CoSb3 materials have attracted significant attention in thermoelectric applications due to their environmental friendliness,thermal stability and excellent thermoelectric properties.While considerable progress has been made in the development of n-type skutterudite thermoelectric thin films,research on high-performance p-type filled skutterudite flexible thin films remains limited,particularly in the context of flexible device integration.In this work,p-type Ce0.9Fe3CoSb12 thin films were deposited on glass substrates via radio frequency magnetron sputtering,and influence of sputtering power(100–120 W)on the film composition,microstructure,and thermoelectric properties was systematically investigated.The results reveal that increasing the sputtering power leads to a gradual decrease in the Ce/Fe atomic ratio and a corresponding increase in the hole concentration,which enhances the electrical conductivity(σ)but reduces the Seebeck coefficient(S).The film deposited at 110 W exhibits the highest thermoelectric performance,achieving a power factor(PF)of 76.7 μW·m–1·K–2 at room temperature and 103.5 μW·m–1·K–2 at 500 K.Building upon these findings,flexible Ce0.9Fe3CoSb12 films were further fabricated on polyimide(PI)substrates with substrate heating applied during deposition to improve interfacial adhesion.A flexible thin-film thermoelectric generator was successfully integrated,and its potential application in temperature sensing was evaluated.The device demonstrates excellent mechanical flexibility and reliable thermal sensing performance,highlighting its promise for use in flexible thermoelectric sensor technologies.关键词
热电/CoSb3/薄膜/磁控溅射/热电传感器Key words
thermoelectric/CoSb3/thin film/magnetron sputtering/thermoelectric sensor分类
通用工业技术引用本文复制引用
葛烨明,汤哲,刘苗,娄四泽,刘振国,周岩,万舜,宗鹏安..Ce0.9Fe3CoSb12薄膜的磁控溅射制备及其热电与传感性能研究[J].无机材料学报,2026,41(1):55-62,中插4,9.基金项目
国家自然科学基金NSAF联合基金(U2230131)Joint Funds of the National Natural Science Foundation of China NSAF(U2230131) （U2230131）
