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Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning

Wenxin Luo Yingcong Zheng Yijun Liu Mingjie Li

半导体学报(英文版)2026,Vol.47Issue(2):51-59,9.
半导体学报(英文版)2026,Vol.47Issue(2):51-59,9.DOI:10.1088/1674-4926/25040018

Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning

Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning

Wenxin Luo 1Yingcong Zheng 1Yijun Liu 1Mingjie Li1

作者信息

  • 1. School of Integrated Circuits,Guangdong University of Technology,Guangzhou 510006,China
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摘要

关键词

MOS sensor/gas identification/MEMS technology/algorithm analysis

Key words

MOS sensor/gas identification/MEMS technology/algorithm analysis

引用本文复制引用

Wenxin Luo,Yingcong Zheng,Yijun Liu,Mingjie Li..Identification of H2 and NH3 gases using calorimetric signals and transient response through machine learning[J].半导体学报(英文版),2026,47(2):51-59,9.

基金项目

This work was supported in part by the National Natural Science Foundation of China(62431018),in part by the Guangzhou Municipal Science and Technology Bureau(SL2023A04J00435),and in part by the One Hundred Youth Project of Guangdong University of Technology(263113873).Technical assistance for sensing feature extraction and par-tial visualization(under guidance)provided by X.Wang is appreciated. (62431018)

半导体学报(英文版)

1674-4926

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