光学精密工程2026，Vol.34Issue(2)：218-230,13.DOI:10.37188/OPE.20263402.0218
基于分数阶滑模自抗扰的压电定位台轨迹跟踪控制
Trajectory tracking control of piezoelectric positioning stage based on fractional-order sliding mode active disturbance rejection control
摘要
Abstract
To achieve high-precision tracking of the piezoelectric positioning stage,a fractional-order ter-minal sliding mode active disturbance rejection controller was developed to address hysteresis,model un-certainties,and load disturbances.By integrating fractional-order theory,terminal sliding mode,and ac-tive disturbance rejection,the controller ensured finite-time error convergence.A continuous and differen-tiable reaching law based on an improved fal nonlinear function was introduced to suppress chattering.Ex-perimental results show that for a 10 μm sinusoidal trajectory under a 200 g load,the controller attains a root mean square error of 0.024 6 μm,improving accuracy by 76.66%,48.00%,and 43.32%compared with PID,integer-order terminal sliding mode,and neural-network-based integer-order terminal sliding mode control,respectively.Under a 40 Hz reference signal,it reduces the average tracking error to 0.186 9 μm.The controller maintains excellent tracking across varying loads,effectively suppresses chat-tering,and exhibits strong robustness to model uncertainties and load disturbances.关键词
压电定位台/分数阶/滑模控制/fal函数/扩张状态观测器Key words
piezoelectric positioning stage/fractional order/sliding mode control/fal function/extended state observer分类
信息技术与安全科学引用本文复制引用
郑后强,康升征,王浩文,李涛..基于分数阶滑模自抗扰的压电定位台轨迹跟踪控制[J].光学精密工程,2026,34(2):218-230,13.基金项目
国家自然科学基金项目(No.52405117,No.62373195) （No.52405117,No.62373195）
江苏省自然科学基金项目(No.BK20220449) （No.BK20220449）
江苏省研究生科研与实践创新计划项目(No.SJCX25_0535) （No.SJCX25_0535）
