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用于精密驱动的双足压电执行器设计

亓雪 陈昱廷 赵美婷 张丽娜 谭秋林

测试技术学报2026,Vol.40Issue(1):55-62,8.
测试技术学报2026,Vol.40Issue(1):55-62,8.DOI:10.62756/csjs.1671-7449.2026019

用于精密驱动的双足压电执行器设计

Design of Bipedal Piezoelectric Actuator for Precision Driving

亓雪 1陈昱廷 2赵美婷 1张丽娜 1谭秋林1

作者信息

  • 1. 中北大学 微纳器件与系统教育部重点实验室,山西 太原 030051||中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051
  • 2. 中北大学 极限环境光电动态测试技术与仪器全国重点实验室,山西 太原 030051
  • 折叠

摘要

Abstract

Piezoelectric actuators have received widespread attention due to their unique working principle and superior performance,and have been widely applied in many fields such as aerospace,microelectron-ics,and medical devices.It is difficult to accurately and quantitatively model and analyze the contact char-acteristics of the piezoelectric actuator,which affects the further improvement of system performance such as speed and load capacity.This article focuses on the research of a bipedal linear piezoelectric actuator and proposes and validates a structural optimization scheme that combines bending vibration equations with finite element numerical analysis.Based on the inverse piezoelectric effect and the equation of free bending vibration of equal section beams,the stator vibration modes and driving mechanisms are analyzed.Solid-Works software is used for 3D modeling,and ANSYS Workbench analysis tool is utilized for numerical simulation analysis of the contact performance of the stator,including the normal amplitude and output characteristics of the driving foot,further optimizing the system structure based on simulation data,and finally verifying the load-bearing capacity.The simulation results show that when the driving voltage is 100 V,the maximum normal displacement amplitudes of the left and right driving feet of the designed piezoelectric actuator are 14 μm and 7.5 μm,respectively.The no-load output speed of the rotor is 156 mm/s,and the maximum load capacity is 10 N.

关键词

压电执行器/有限元分析/结构优化/数值仿真

Key words

piezoelectric actuator/finite element analysis/structural optimization/simulation analysis

分类

信息技术与安全科学

引用本文复制引用

亓雪,陈昱廷,赵美婷,张丽娜,谭秋林..用于精密驱动的双足压电执行器设计[J].测试技术学报,2026,40(1):55-62,8.

基金项目

山西省基础研究计划青年项目(202303021222112) (202303021222112)

国家重点研发计划资助项目(2023YFB3209100) (2023YFB3209100)

国家自然科学基金资助项目(U24A20136) (U24A20136)

测试技术学报

1671-7449

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