计量学报2026，Vol.47Issue(1)：63-75,13.DOI:10.3969/j.issn.1000-1158.2026.01.09
薄膜热扩散率测量技术研究进展
Research Progress in Thin Film Thermal Diffusivity Measurement Technology
摘要
Abstract
Thin films,due to their unique physical,chemical,and mechanical properties,play a crucial role in the development of modern high-tech industries,and the precise understanding of their thermal properties is becoming increasingly important.Thermal diffusivity refers to the ability of a material to approach a uniform temperature under a temperature gradient,reflecting the heat transfer process of an object under non-steady-state conditions.Accurate measurement of the thermal diffusivity of thin films is of great significance for material science and engineering applications.Unlike bulk materials,the measurement of thermal diffusivity for thin films is more difficult,and the requirements for measurement technology are more stringent,which necessitates the development of new methods or the improvement of existing technologies.The measurement techniques for the thermal diffusivity of thin films are mainly based on the photoacoustic and photothermal effects.Based on the methods for measuring the thermal diffusivity of thin films in recent years,the measurement techniques for the in-plane and cross-plane directions of thin films are reviewed,providing a reference for future research and development of thin film measurement techniques.关键词
热学计量/热扩散率/薄膜面内/垂直平面/光声效应/光热效应/瞬态热流/周期热流Key words
thermometrics/thermal diffusivity/in-plane of film/cross-plane/photoacoustic effects/photothermal effects/transient heat flow/cyclic heat flow分类
通用工业技术引用本文复制引用
韩艺良,张圣梓,刘晓萌,郝蕴琦,杨坤,汪洪军..薄膜热扩散率测量技术研究进展[J].计量学报,2026,47(1):63-75,13.基金项目
国家重点研发计划((2022YFF0610804) （(2022YFF0610804）
中国计量科学研究院质量技术基础能力建设专项项目(ANL2406) （ANL2406）
