光学精密工程2026，Vol.34Issue(3)：353-364,12.DOI:10.37188/OPE.20263403.0353
细束径离子束变去除函数加工工艺及补偿
Machining process and compensation for variable removal function with fine-diameter ion beams
摘要
Abstract
Deterministic ion-beam figuring of high-precision optical surfaces requires stable and accurate-ly controllable removal functions.To improve in-process control of the ion-beam removal function and to establish a variable removal-function compensation model for fine-beam-diameter ion beams,a sys-tematic framework was developed for investigating,compensating,and optimizing removal-function variability during machining.First,the practical instability of the removal function was analyzed theoret-ically.Subsequently,the governing factors were derived and classified into direct effects(thermal accu-mulation and energy distribution)and indirect effects(dwell time and lateral velocity).Dynamic remov-al-function experiments were then performed to validate the influence of dwell time on the removal rate,and tests using two beam diameters confirmed the generality of the observed behavior.Finally,a com-pensation strategy and machining guidelines were proposed based on the effect of lateral velocity on the removal rate.The results demonstrate that regulating dwell time and lateral velocity can significantly en-hance the convergence rate in fine-beam-diameter machining of high-precision optical surfaces.In sub-nanometer machining validation,a 0.332 nm RMS figure error was achieved on a 100 mm ULE flat mir-ror,satisfying practical requirements for stability,reliability,high precision,and controllability of fine-beam-diameter ion-beam processing.关键词
光学加工/离子束加工/细束径/变去除函数/驻留时间/非线性补偿Key words
optical manufacturing/ion beam figuring/fine beam diameter/variable removal function/dwell time/nonlinear compensation分类
信息技术与安全科学引用本文复制引用
毛旭,张峰,唐瓦,胡海翔,季鹏,张学军..细束径离子束变去除函数加工工艺及补偿[J].光学精密工程,2026,34(3):353-364,12.基金项目
国家自然科学基金资助项目(No.62405314) （No.62405314）
吉林市科技发展计划资助项目(No.SKL202402021) （No.SKL202402021）
长春市科技发展计划资助项目(No.2024GZZ19) （No.2024GZZ19）
