光学精密工程2026，Vol.34Issue(4)：571-585,15.DOI:10.37188/OPE.20263404.0571
压电纤维驱动的二自由度跨尺度粘滑运动平台
Two-degree-of-freedom cross-scale stick-slip motion platform driven by macro fiber composite
摘要
Abstract
Regarding the multi-degree-of-freedom,macro-stroke,and high-precision motion requirements in micro-manipulation and micro-assembly fields,a two-degree-of-freedom cross-scale parallel decoupled motion platform with piezoelectric stick-slip actuation was proposed.Macro fiber composites were used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit,achieving nanometer-level motion resolution,enhancing single-step output displacement,and enabling two-dimen-sional planar motion decoupling.Subsequently,stick-slip driving principles were utilized to achieve macro-stroke motion,while universal bearings and adjustable support were employed to enhance load-bearing ca-pacity.A theoretical model of the platform was established using the finite element method,and simula-tions were conducted to analyze its output displacement and natural frequency.Finally,an experimental platform was constructed to test the relevant performance.Experimental results show that during continu-ous stRegarding the multi-degree-of-freedom,macro-stroke,and high-precision motion requirements in micro-manipulation and micro-assembly fields,a two-degree-of-freedom cross-scale parallel decoupled mo-tion platform with piezoelectric stick-slip actuation is proposed.Macro fiber composites are used to actuate compliant mechanisms to design an integrated drive-structure arch-shaped driving unit,achieving nanome-ter-level motion resolution,enhancing single-step output displacement,and enabling two-dimensional pla-nar motion decoupling.Subsequently,stick-slip driving principles are utilized to achieve macro-stroke mo-tion,while universal bearings and adjustable support are employed to enhance load-bearing capacity.A theoretical model of the platform is established using the finite element method,and simulations are con-ducted to analyze its output displacement and natural frequency.Finally,an experimental platform was constructed to test the relevant performance.ep motion,the maximum single-step displacements of the piezoelectric stick-slip motion platform along the x and y axes are 249.6 μm and 237.3 μm,respectively,with a motion range of 16.10 mm×16.08 mm.Even under a vertical load of 30 N,the stick-slip motion platform still achieves a single-step output displacement of 16 μm.Additionally,the translational displace-ment resolutions are 6.3 nm and 6.8 nm during single-step precision motion,respectively.Therefore,the designed piezoelectric stick-slip motion platform can meet the multi-dimensional,cross-scale micro-nano motion requirements.关键词
压电驱动/粘滑运动/柔顺机构/二自由度Key words
piezoelectric actuation/stick-slip motion/compliant mechanism/two degrees of freedom分类
机械制造引用本文复制引用
莫衍楠,杨依领,孟恬畅,魏燕定,崔玉国..压电纤维驱动的二自由度跨尺度粘滑运动平台[J].光学精密工程,2026,34(4):571-585,15.基金项目
国家自然科学基金(No.52575125,No.U23A20618) （No.52575125,No.U23A20618）
宁波市重大科技攻关项目(No.2024Z163) （No.2024Z163）
