光学精密工程2026，Vol.34Issue(4)：586-598,13.DOI:10.37188/OPE.20263404.0586
磁阻驱动柔顺精密定位平台设计与测试分析
Design and test analysis of a compliant precision positioning stage driven by reluctance actuators
摘要
Abstract
To meet the comprehensive requirements of high force density and high-precision control for a medium-stroke micro-nano precision positioning stage,a compliant precision positioning stage based on re-luctance actuators was designed and analyzed,with nonlinear hysteresis modeling and trajectory tracking control implemented.First,by analyzing the equivalent magnetic circuit of the reluctance actuator and its drive force characteristics under different air gaps,combined with the stiffness model of the flexure mecha-nism,the stage design parameters and the suitable air gap size for stage operation were determined.Subse-quently,an experimental system was set up,and a feedforward compensation strategy incorporating a ra-tional function and a Prandtl-Ishlinskii hysteresis inverse model was constructed to achieve nonlinear com-pensation for the reluctance actuator.Finally,a feedback control method comprising proportional-integral control and a notch filter was utilized to conduct trajectory tracking control experiments.Experimental re-sults demonstrate that the constructed hysteresis inverse model compensation and control method signifi-cantly enhances the stage's control accuracy.After nonlinear compensation,the root mean square errors for tracking two different triangular wave signals were reduced by 69.2%and 63.68%,respectively,vali-dating the feasibility and effectiveness of the designed compliant precision positioning stage using reluc-tance actuation in micro-nano positioning applications.关键词
磁阻驱动器/柔性机构/磁滞/精密定位平台/轨迹跟踪控制Key words
reluctance actuator/compliant mechanism/hysteresis/precision positioning stage/trajecto-ry tracking control分类
信息技术与安全科学引用本文复制引用
王巍,尹小恰,赖磊捷,朱利民..磁阻驱动柔顺精密定位平台设计与测试分析[J].光学精密工程,2026,34(4):586-598,13.基金项目
国家自然科学基金项目(No.52475063) （No.52475063）
