液晶与显示2026，Vol.41Issue(2)：197-207,11.DOI:10.37188/CJLCD.2025-0232
用于多层结构测量的SD-OCT系统优化设计及仿真
Optimized design and simulation of SD-OCT system for multilayer structure measurement
摘要
Abstract
Spectral Domain Optical Coherence Tomography(SD-OCT)systems have been extensively studied for biological tissue measurement,featuring non-invasiveness,micron-level resolution,and real-time detection capabilities.To expand their application scope to the measurement of industrial products with multilayer structures,it is necessary to optimize the performance of SD-OCT systems.Firstly,this study optimizes the parameters of the sample arm field lens using ZEMAX.Aberrations are reduced by adjusting the lens curvature,focal length,and optical path layout,and a matched scanning lens is designed to expand the detection range.Secondly,the spectrometer parameters are optimized:appropriate lenses and gratings are selected,and the optical path layout and device tilt angle are adjusted to improve spectral resolution and imaging depth.Finally,MATLAB is used to establish a simulation model for the system's axial resolution,which supports tomographic imaging simulation experiments of multilayer sample structures.The results show that the comprehensive performance of the optimized SD-OCT system is significantly improved.The lateral resolution is enhanced to 20 µm,while a large scanning range of 34 mm×34 mm is achieved.The imaging depth is increased to 2.44 mm,enabling effective penetration of multilayer industrial structures.The axial resolution is verified by simulation to be 6.40 µm,with the simulation results highly consistent with the theoretical calculation values.Additionally,the tomographic imaging simulation of multilayer sample structures is successfully realized.The proposed optimization design method for the SD-OCT system provides valuable reference and promotion for its applications in other fields.关键词
ZEMAX/谱域光学相干层析成像/分辨率/成像深度/光谱仪Key words
ZEMAX/spectral-domain optical coherence tomography/resolution/imaging depth/spectrometer分类
机械制造引用本文复制引用
周颖,王辰,吴晶晶,俞琳,胡立发..用于多层结构测量的SD-OCT系统优化设计及仿真[J].液晶与显示,2026,41(2):197-207,11.基金项目
国家自然科学基金(No.61475152,No.62205127)Supported by National Natural Science Foundation of China(No.61475152,No.62205127) （No.61475152,No.62205127）
