南京理工大学学报（自然科学版）2026，Vol.50Issue(1)：51-60,10.DOI:10.14177/j.cnki.32-1397n.2026.50.01.006
宏微运动平台的最优鲁棒跟踪控制算法研究
Optimal robust tracking control algorithm for a macro-micro motion stage
摘要
Abstract
Macro-micro motion stage is a composite precision motion system for providing long-stroke high-precision movement.The micro stage with compliant mechanism support can effectively improve the overall accuracy of the macro-micro motion system since there is no friction.However,such macro-micro motion systems are faced with some problems and challenges,such as coupling internal stress,model parameter uncertainties and control architecture constraints,resulting in limited performance improvement.We propose an optimal robust control algorithm for achieving precision track and control input chattering suppression of the macro-micro motion stage.The overall control frame adopts a two-degree-of-freedom control structure.The feedforward controller is designed based on the nominal dynamic model.The feedback controller is obtained by solving a hybrid H2/H∞optimal decentralized control problem considering model uncertainty.By defining a parameter space,the robust stability constraint and the decentralized feedback constraint are projected into a convex set,then the constrained optimal robust control problem is described as a convex optimization problem to be efficiently solved.Finally,the effectiveness of the proposed algorithm is verified by prototype experiments.关键词
宏微运动平台/柔性机构/最优控制/鲁棒控制/分散式控制Key words
macro-micro motion stage/compliant mechanism/optimal control/robust control/decentralized control分类
信息技术与安全科学引用本文复制引用
袁黎明,钱晨,陈思鲁,张驰..宏微运动平台的最优鲁棒跟踪控制算法研究[J].南京理工大学学报（自然科学版）,2026,50(1):51-60,10.基金项目
国家自然科学基金(52305041) （52305041）
省部共建精密电子制造技术与装备国家重点实验室开放课题(JMDZ202317) （JMDZ202317）
中国博士后科学基金(2023M743626) （2023M743626）
中国科学院"全球共性挑战专项"项目(174433KYSB20210060) （174433KYSB20210060）
宁波市自然科学基金(2023J406) （2023J406）
