真空电子技术Issue(1)：41-46,6.DOI:10.16540/j.cnki.cn11-2485/tn.2026.01.06
实验室X射线仪器用横向梯度多层膜抛物面准直镜
Parabolic Curved Graded Multilayers Based Collimated-beam Mirror for Laboratory X-ray Diffractometer
摘要
Abstract
The importance of the collimated-beam mirror using parabolic curved graded multilayers for labo-ratory X-ray diffractometer is introduced.Based on the performance requirements of the diffractometer,the surface shape curve and multilayer film structure of the collimated-beam mirror are designed.By combining the planetary motion magnetron sputtering system with high-speed rotating mask technology,the parabolic curved graded multilay-ers are fabricated.The deviation between the measured period and the design value is less than±1%,and the reflectivity of the Cu Kα line is greater than 70%.The divergence angles of the X-ray beam formed by the full col-limating mirror surface with epoxy replicated substrate and optical polished substrate are 0.475 mrad and 0.164 mrad,respectively;and the former obtains a measured divergence angle of 0.428 mrad in the application instrument.All the values can meet the requirement of the collimating mirror for X-ray diffractometers.关键词
X射线衍射仪/抛物面准直镜/横向梯度多层膜/反射率Key words
X-ray diffractometer/X-ray Parabolic Collimating mirror/Graded multilayer/Reflectivity分类
机械制造引用本文复制引用
宋文韬,蒋励,汤丰锐,项丝梦,张众,王占山..实验室X射线仪器用横向梯度多层膜抛物面准直镜[J].真空电子技术,2026,(1):41-46,6.基金项目
国家重点研发计划项目(2022YFF0709100) （2022YFF0709100）
