半导体学报（英文版）2026，Vol.47Issue(3)：6-9,4.DOI:10.1088/1674-4926/26010049
θ-TaN:Redefining the thermal conductivity limit of metallic materials
θ-TaN:Redefining the thermal conductivity limit of metallic materials
Miao-Ling Lin 1Ping-Heng Tan1
作者信息
- 1. State Key Laboratory of Semiconductor Physics and Chip Technologies,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China
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引用本文复制引用
Miao-Ling Lin,Ping-Heng Tan..θ-TaN:Redefining the thermal conductivity limit of metallic materials[J].半导体学报（英文版）,2026,47(3):6-9,4.
