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AlScN:characteristics,micro/nano fabrication and multiple applications

Shihang Liu Jinfeng Gao Jiajie Pan Lin Li Hanxiang Jia Shuangzan Lu Maowei Zhang Bo Zhao Jun Liu

半导体学报（英文版）2026，Vol.47Issue(3)：10-27,18.

半导体学报（英文版）2026，Vol.47Issue(3)：10-27,18.DOI:10.1088/1674-4926/25060031

AlScN:characteristics,micro/nano fabrication and multiple applications

Shihang Liu ¹Jinfeng Gao ¹Jiajie Pan ²Lin Li ¹Hanxiang Jia ¹Shuangzan Lu ¹Maowei Zhang ¹Bo Zhao ¹Jun Liu¹

作者信息

1. Hubei Jiufengshan Laboratory,Wuhan 430074,China
2. Hubei Jiufengshan Laboratory,Wuhan 430074,China||School of Science,Hubei University of Technology,Wuhan 430068,China
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摘要

关键词

aluminum scandium nitride/material properties/micro/nano fabrication/device integration

Key words

aluminum scandium nitride/material properties/micro/nano fabrication/device integration

引用本文复制引用

Shihang Liu,Jinfeng Gao,Jiajie Pan,Lin Li,Hanxiang Jia,Shuangzan Lu,Maowei Zhang,Bo Zhao,Jun Liu..AlScN:characteristics,micro/nano fabrication and multiple applications[J].半导体学报（英文版）,2026,47(3):10-27,18.

基金项目

This work was supported by the National Natural Sci-ence Foundation of China(General Program,No.52473331). （General Program,No.52473331）

半导体学报（英文版）

ISSN：1674-4926

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