首页|期刊导航|半导体学报（英文版）|Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systems

Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systems

Yuehao Li Chao Shen Wenkang Zhan Bo Xu Yazhou Yang Xu Zhang Hongchang Wang Chao Zhao Haifang Jian

半导体学报（英文版）2026，Vol.47Issue(3)：28-37,10.

半导体学报（英文版）2026，Vol.47Issue(3)：28-37,10.DOI:10.1088/1674-4926/25070029

Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systems

Yuehao Li ¹Chao Shen ¹Wenkang Zhan ¹Bo Xu ¹Yazhou Yang ¹Xu Zhang ²Hongchang Wang ¹Chao Zhao ¹Haifang Jian¹

作者信息

1. Laboratory of Solid State Optoelectronics Information Technology,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China||School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,China
2. School of Materials Science and Opto-Electronic Technology,University of the Chinese Academy of Sciences,Beijing 101804,China||School of Electronic,Electrical and Communication Engineering,University of the Chinese Academy of Sciences,Beijing 101804,China
折叠

摘要

关键词

contrastive learning/molecular beam epitaxy/real-time control/reflection high-energy electron diffraction

Key words

contrastive learning/molecular beam epitaxy/real-time control/reflection high-energy electron diffraction

引用本文复制引用

Yuehao Li,Chao Shen,Wenkang Zhan,Bo Xu,Yazhou Yang,Xu Zhang,Hongchang Wang,Chao Zhao,Haifang Jian..Contrastive learning for data-efficient substrate deoxidation monitoring in edge-side adaptive molecular beam epitaxy systems[J].半导体学报（英文版）,2026,47(3):28-37,10.

基金项目

This work was supported by the Beijing Natural Science Foundation(Grant Nos.F251036 and L248103),CAS Project for Young Scientists in Basic Research(Grant Nos.YSBR-090 and YSBR-05),and National Natural Science Foundation of China(Grant No.62274159). （Grant Nos.F251036 and L248103）

半导体学报（英文版）

ISSN：1674-4926

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