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A distributed static model of capacitive MEMS microwave power detection chip

Ruifeng Li Debo Wang

半导体学报（英文版）2026，Vol.47Issue(3)：54-64,11.

半导体学报（英文版）2026，Vol.47Issue(3)：54-64,11.DOI:10.1088/1674-4926/25100007

A distributed static model of capacitive MEMS microwave power detection chip

Ruifeng Li ¹Debo Wang¹

作者信息

1. College of Integrated Circuit Science and Engineering,Nanjing University of Posts and Telecommunications,Nanjing 210023,China
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摘要

关键词

MEMS/power detection/cantilever beam/static model/sensitivity

Key words

MEMS/power detection/cantilever beam/static model/sensitivity

引用本文复制引用

Ruifeng Li,Debo Wang..A distributed static model of capacitive MEMS microwave power detection chip[J].半导体学报（英文版）,2026,47(3):54-64,11.

基金项目

This work was supported by the National Natural Sci-ence Foundation of China(61904089),and the Province Natu-ral Science Foundation of Jiangsu(BK20190731). （61904089）

半导体学报（英文版）

ISSN：1674-4926

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