传感技术学报2026，Vol.39Issue(2)：238-243,6.DOI:10.3969/j.issn.1004-1699.2026.02.002
面向柔性触觉感知的高精度毫牛级力传感器
High-Precision Millinewton-Level Force Sensor for Flexible Tactile Perception
摘要
Abstract
With the rise of various intelligent equipment,higher requirements have been put forward for the measurement and accuracy of weak forces on flexible interfaces.A pressure-sensitive sensor isproposed,which combines a cantilever beam as a sensitive element with laser ranging,and its structural characteristics and measurement principles are analyzed.The relationship between the deflection of the cantilever beam and the applied force is obtained through a balance calibration experiment,and precise pressure values are derived from the deflection of the cantilever beam.Finally,the performance of the sensor is validated through verification experiments.The ex-perimental results show that in the range of 0～120 mN,the sensor has good measurement performance for flexible force objects repre-sented by silicone materials.The sensitivity of the sensor described can reach 0.060 7 mm/mN,the measurement resolution can reach 0.13 mN,and the repeatability error is less than 1.51％.关键词
力传感器/毫牛力/悬臂梁/柔性物体Key words
force sensor/millinewton force/cantilever beam/flexible object分类
信息技术与安全科学引用本文复制引用
李佳慧,汪永其,鲜欣妍,魏霄怡,朱周洪,赵天琦,甘海勇,沈常宇..面向柔性触觉感知的高精度毫牛级力传感器[J].传感技术学报,2026,39(2):238-243,6.基金项目
国家重点研发计划项目(2021YFF0600203) （2021YFF0600203）
国家自然科学基金项目(12574330,12274386) （12574330,12274386）
