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m-MoO2薄膜中厚度依赖的拉曼光谱研究

龚之麟 程晋罗 包有喆 单雨薇 辛星 范炟铄 石芝铭 王韦茗 常凯楠 宋颖

发光学报2026,Vol.47Issue(2):211-217,7.
发光学报2026,Vol.47Issue(2):211-217,7.DOI:10.37188/CJL.20250234

m-MoO2薄膜中厚度依赖的拉曼光谱研究

Thickness-dependent Raman Spectroscopy of m-MoO2 2D Flakes

龚之麟 1程晋罗 1包有喆 2单雨薇 1辛星 2范炟铄 3石芝铭 3王韦茗 4常凯楠 4宋颖5

作者信息

  • 1. 中国科学院长春光学精密机械与物理研究所特种发光科学与技术全国重点实验室,微纳光子学与材料国际实验室,吉林长春 130033||中国科学院大学,北京 100049
  • 2. 东北师范大学物理学院,集成光电子学国家重点实验室,紫外发光材料与技术教育部重点实验室,吉林长春 130024
  • 3. 中国科学院长春光学精密机械与物理研究所特种发光科学与技术全国重点实验室,吉林长春 130033
  • 4. 中国科学院长春光学精密机械与物理研究所特种发光科学与技术全国重点实验室,微纳光子学与材料国际实验室,吉林长春 130033
  • 5. 中国科学院长春光学精密机械与物理研究所光学系统先进制造全国重点实验室,吉林长春 130033
  • 折叠

摘要

Abstract

Monoclinic-phase molybdenum dioxide(m-MoO2)two-dimensional(2D)flakes exhibit outstanding prop-erties comparable to those of noble metals,with tunable performance depending on flake thickness.This makes it high-ly promising for applications in areas such as environmental monitoring and wastewater sensing.One of prerequisites for achieving high-performance MoO2-based devices is the development of an in-situ,rapid,and non-destructive method for measuring flake thickness.In this work,the dependence of the Raman spectra of MoO2 2D thin flakes on flake thickness is investigated,providing a method for in-situ,non-destructive thickness characterization.Excited with 532 nm laser,the shift in the Raman characteristic peak at 127 cm-1 effectively reflects the variation in flake thick-ness.Furthermore,by adjusting the polarization of the excitation light,the crystal axis orientation of the MoO2 thin flake can be calibrated.The Raman spectroscopic results thus offer an effective and convenient approach for monitor-ing the flake thickness in MoO2-based device fabrication.

关键词

二氧化钼薄膜/拉曼光谱/原位无损检测

Key words

m-MoO2 flakes/Raman spectroscopy/in situ non-destructive detection

分类

数理科学

引用本文复制引用

龚之麟,程晋罗,包有喆,单雨薇,辛星,范炟铄,石芝铭,王韦茗,常凯楠,宋颖..m-MoO2薄膜中厚度依赖的拉曼光谱研究[J].发光学报,2026,47(2):211-217,7.

基金项目

国家自然科学基金重点项目(12034003) (12034003)

中国科学院长春光学精密机械与物理研究所"曙光"人才项目 ()

吉林省科技发展计划项目(20250102010JC)Supported by National Natural Science Foundation of China(12034003) (20250102010JC)

the'Shu Guang'Talent Program of CIOMP ()

Natural Scientific Foundation of Jilin Province Science and Technology Department(20250102010JC) (20250102010JC)

发光学报

1000-7032

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