测试科学与仪器2026，Vol.17Issue(1)：1-15,15.DOI:10.62756/jmsi.1674-8042.2026001
基于微观结构的太赫兹传感技术:从电磁响应增强到多尺度检测
Microstructure-based terahertz sensing technology:from electromagnetic response enhancement to multi-scale detection
摘要
Abstract
Terahertz(THz)waves exhibit distinctive properties,such as high transmittance,pronounced absorption,and minimal photon energy,enabling a wide range of applications in biomedical diagnosis,non-destructive testing,and quality/safety monitoring of food and agricultural products.Consequently,THz-based sensors have garnered increasing attention.However,the design of traditional coupling structures fails to effectively match the high-frequency oscillation of THz waves,resulting in low signal energy transmission efficiency and limiting the performance of THz sensors,while microstructure technology can offer a solution by achieving localized enhancement of the electromagnetic field energy through precise matching of sub-wavelength resonance units with the high-frequency oscillation of THz waves,which significantly improves the sensitivity of THz sensors.This review summarizes the basic principles and research status of various THz sensors based on different microstructures,such as split-ring resonators(SRRs),photonic crystals,waveguide resonators,and surface plasmon resonance.Notably,the rapid development of artificial intelligence,especially deep learning,is increasingly influencing THz sensing technologies with its strengths in signal processing,pattern recognition accuracy,and inverse design.Integrating deep learning with THz sensor design enhances feature extraction from complex signals,improves target identification,and enables intelligent optimization of microstructure parameters for high-performance sensor design and performance prediction.This interdisciplinary approach provides a new pathway to overcome traditional design limitations and advance THz sensor performance.关键词
太赫兹/人工微结构/传感器/表面等离子体共振/波导/光子晶体/深度学习Key words
terahertz(THz)/artificial microstructures/sensors/surface plasmon resonance/waveguides/photonic crystals/deep learning引用本文复制引用
张姝,雷程,梁庭,牛文宇,郝亚峰,马富鹏,朱璞,武慧嘉,黄育杰,李腾腾,刘美宏..基于微观结构的太赫兹传感技术:从电磁响应增强到多尺度检测[J].测试科学与仪器,2026,17(1):1-15,15.基金项目
This work was supported by National Natural Science Foundation of China(Nos.62301509,62405293),and General Project of China Postdoctoral Science Foundation(No.2025M770537). （Nos.62301509,62405293）
