华侨大学学报（自然科学版）2026，Vol.47Issue(2)：127-135,9.DOI:10.11830/ISSN.1000-5013.202508007
晶圆制造薄膜车间的对象Petri网和人工势场调度优化方法
Object Petri Net and Artificial Potential Field Scheduling Optimization Method for Wafer Fabrication Thin-Film Workshop
摘要
Abstract
To address the scheduling optimization challenge in wafer fabrication thin-film workshops,where robot path planningis tightly coupled with machine resource allocation,a method that can obtain high-quality scheduling solutions within limited computation time is proposed.An object Petri Net model is constructed to integrate robot path,machine processing,and task workflows into a unified framework.A time-consumption-based artificial potential field is designed,in which task demand intensity is introduced to dynamically charac-terize resource urgency.Meanwhile,a relationship between the amplification factor and the potential field function is proposed to enhance the utilization of high-cost equipment.Based on these designs,an artificial po-tential field guided A* search algorithm is developed.Experimental results show that,for small-scale tasks,the proposed method achieves the same optimal solution as the Dijkstras algorithm while improving search effi-ciency by approximately 96％.In complex multi-robot scenarios,where Dijkstra fails due to state-space explo-sion,the proposed method is still able to generate near-optimal scheduling solution within minutes.关键词
智能制造/晶圆制造薄膜车间/对象Petri网/人工势场/A*算法/调度优化Key words
intelligent manufacturing/wafer fabrication thin-film workshop/object Petri Net/artificial poten-tial field/A* algorithm/scheduling optimization分类
信息技术与安全科学引用本文复制引用
叶兆宇,张升龙,周家忠,伊思嘉,罗继亮..晶圆制造薄膜车间的对象Petri网和人工势场调度优化方法[J].华侨大学学报（自然科学版）,2026,47(2):127-135,9.基金项目
国家自然科学基金资助项目(61973130) （61973130）
