计量学报2026，Vol.47Issue(2)：251-255,5.DOI:10.3969/j.issn.1000-1158.2026.02.12
67GHz微波探针散射参数校准及不确定度评定方法研究
Research on Calibration and Uncertainty Evaluation Method of Scattering Parameters for 67 GHz Microwave Probes
摘要
Abstract
A method for calibrating scattering parameters and evaluating uncertainty of 67 GHz microwave probe is proposed.A microwave probe measurement model is established,and the calibration values of microwave probe scattering parameters are calculated by measuring and defining the scattering parameters of the on-wafer open calibration standard,short calibration standard and load calibration standard.The source of uncertainty is analyzed and the measurement uncertainty is evaluated by Monte Carlo method.The experimental analysis is carried out,and in the range of 100 MHz～67 GHz,the S11 and S22 are better than-15 dB,and the S21 is better than-1 dB,which meets the technical specifications,and the correctness of the method is verified.The calibration method in this study provides quantitative basis for whether the microwave probes meet the test requirement.关键词
无线电计量/微波探针/在片散射参数/校准/不确定度Key words
electronic metrology/microwave probe/on-wafer scattering parameters/calibration/uncertainty分类
通用工业技术引用本文复制引用
霍晔,王一帮,刘晨,吴爱华,栾鹏,王浩,张立飞..67GHz微波探针散射参数校准及不确定度评定方法研究[J].计量学报,2026,47(2):251-255,5.基金项目
河北省军民融合科技创新项目(SJMYF202413) （SJMYF202413）
