机电工程技术2026，Vol.55Issue(5)：71-78,8.DOI:10.3969/j.issn.1009-9492.2026.05.011
基于电子光学系统的二次电子收集效率研究
Study on Secondary Electron Collection Efficiency Based on Electron Optical System
摘要
Abstract
To address the issue of insufficient secondary electron collection efficiency in scanning electron microscopes,the motion characteristics of secondary electrons and their influence mechanisms on collection efficiency are studied based on electromagnetic field modeling and numerical simulation methods.A numerical model of the electromagnetic field for secondary electron trajectories under typical imaging systems is established using the 3D module of MEBS software.Through simulation analysis of parameters such as detector potential,detector size,and working distance,optimization strategies for improving collection efficiency are systematically explored.During the simulation process,the finite difference method is used to calculate the electromagnetic field distribution of the imaging system,and the motion behavior of secondary electrons is tracked based on three-dimensional trajectory simulations.The results show that appropriately increasing the detector potential significantly enhances the collection efficiency.In the ET detector system located on the chamber sidewall,when the potential is set to 300 V,the collection efficiency is markedly higher than that at 200 V and 100 V.However,an excessively high potential causes surface charge accumulation,which affects the stability of the primary beam;therefore,a trade-off between collection efficiency and beam stability must be considered.The simulations also reveal that enlarging the detector size expands the capture range for secondary electrons and improves signal collection efficiency.When the outer diameter of the in-lens annular detector is increased from 8.6 mm to 9.8 mm,the collection efficiency rises from 27.78%to 50%;when the diameter of the ET detector on the chamber sidewall is increased from 5 mm to 8 mm,the efficiency increases from 11.11%to 22.22%.However,the enlargement of the detector size must also take into account system stability and spatial layout requirements.Moreover,the working distance exerts a significant impact on collection efficiency.Under an accelerating voltage of 8000 V,when the working distance is 12 mm,the collection efficiency reaches 22.22%,whereas at 18 mm,it decreases to 10%.A shorter working distance facilitates the guiding efficiency of secondary electrons and must be optimized in conjunction with voltage conditions and detector configurations.The research results provide theoretical support for the optimization design of signal electron collection systems in scanning electron microscopes and hold significant importance for enhancing imaging quality and signal stability,offering theoretical guidance and engineering references for the optimization of SEM detector systems.关键词
扫描电子显微镜/二次电子/收集效率/探测器Key words
scanning electron microscope(SEM)/secondary electrons/collection efficiency/detector分类
数理科学引用本文复制引用
段飞,邓辅秦,陈杏文,刘珠明..基于电子光学系统的二次电子收集效率研究[J].机电工程技术,2026,55(5):71-78,8.基金项目
广东省重点领域研发计划项目(2020B0101320002) （2020B0101320002）
