陕西师范大学学报（自然科学版）2026，Vol.54Issue(2)：11-18,8.DOI:10.15983/j.cnki.jsnu.2026209
非线性Lamb波检测硅片亚表面微裂纹的数值仿真与机理分析
Numerical simulation and mechanism analysis of subsurface microcrack detection in silicon wafers using nonlinear Lamb waves
摘要
Abstract
In recent years,advances in semiconductor silicon wafer manufacturing have increased the demand for accurate detection of subsurface defects.When inspecting microcracks far smaller than the wavelength,nonlinear Lamb waves offer distinct advantages such as high efficiency,high sensitivity,and nondestructive evaluation.However,their application in silicon wafer inspection remains limited,partly due to the unclear relationship between nonlinear Lamb wave signal characteristics and subsurface microcrack features.In this work,finite element models of Lamb wave propagation in silicon wafers with subsurface microcracks are established.The Lamb wave mode pair S0-s0,satisfying phase-velocity matching,is employed to investigate how the acoustic nonlinearity parameter(ANP)of the second-harmonic correlates with propagation distance and microcrack characteristics.Simulation results indicate that the ANP increases with propagation distance,and the presence of subsurface microcracks significantly amplifies its amplitude.Moreover,the relative ANP increases with the number,length,density of subsurface microcracks,and subsurface damage layer thickness.Additionally,for a given density,the length of subsurface microcracks has a more significant influence on the relative ANP than their number.This study illustrates the potential of nonlinear Lamb waves for detecting subsurface microcracks in silicon wafers and provides simulation-based validation for its feasibility.关键词
非线性超声/Lamb波/硅片/亚表面微裂纹/数值仿真Key words
nonlinear ultrasonic/Lamb wave/silicon wafer/subsurface microcrack/numerical simulation分类
通用工业技术引用本文复制引用
胡兰艺,尹莘新,许才彬,赵友选,邓明晰..非线性Lamb波检测硅片亚表面微裂纹的数值仿真与机理分析[J].陕西师范大学学报（自然科学版）,2026,54(2):11-18,8.基金项目
国家自然科学基金(12474437,12134002) （12474437,12134002）
重庆市自然科学基金(CSTB2024NSCQ-MSX1074) （CSTB2024NSCQ-MSX1074）
