大学化学2026，Vol.41Issue(1)：114-121,8.DOI:10.12461/PKU.DXHX202505104
基于半实物的场发射扫描电镜数字化实验设计
Design of Digital Experiment for Field Emission Scanning Electron Microscopy Based on Semi-Physical Simulation
摘要
Abstract
To overcome the challenges in effectively implementing experimental teaching of field emission scanning electron microscopy(FE-SEM),this study developed an algorithm that simulates real-time image variations resulting from parameter adjustments including astigmatism,focus,and brightness,while replicating the complete operational procedure.An interactive simulation console is developed to enable interactive operations,aiming to enhance students'capabilities in parameter adjustment and image acquisition for FE-SEM.The proposed scheme achieves high-fidelity simulation in both experimental content and operational methods,with potential applications in teaching transmission electron microscopy and similar instrumentation courses.关键词
半实物仿真/数字化实验/扫描电镜/实验教学Key words
Semi-physical simulation/Digital experiment/Scanning electron microscopy(SEM)/Experimental Teaching分类
社会科学引用本文复制引用
何攀,严军林,陈志刚,代恩鸣,赵鑫,王蕊娟..基于半实物的场发射扫描电镜数字化实验设计[J].大学化学,2026,41(1):114-121,8.基金项目
陕西师范大学实验室技术研究项目(SYJS202403,SYJS202422,SYJS202505) （SYJS202403,SYJS202422,SYJS202505）
