光学精密工程2026，Vol.34Issue(5)：701-710,10.DOI:10.37188/OPE.20263405.0701
基于多测头的反射镜面形检测
Mirror surface shape measurement based on multiple probes
摘要
Abstract
To address the limitation that conventional single-probe measurement methods used during the grinding stage of optical components are highly sensitive to machine tool guideway motion errors and strug-gle to balance measurement accuracy with in-situ measurement efficiency,a multi-probe non-contact sur-face form measurement method suitable for integration with conventional machine tools is proposed,en-abling high-precision in-situ measurement during the grinding process of optical components.First,the dif-ferential measurement principle of a multi-probe system composed of three laser displacement sensors is in-troduced.By performing pairwise differencing among the three probes,the influence of machine tool guideway motion errors is effectively suppressed,and the displacement differences are transformed into lo-cal surface slope information.Subsequently,a surface reconstruction approach based on Zernike polynomi-al slope fitting is described,in which the full-aperture surface form is reconstructed from the measured slope field using a least-squares fitting method.A geometric simulation model of the measurement system is then established,and the effects of probe position and orientation errors on the reconstructed surface are analyzed using the Monte Carlo method.Furthermore,Sobol global sensitivity indices are employed to quantitatively evaluate the contributions of different error sources to the RMS error,providing guidance for system alignment tolerance allocation and error control strategies.Experimental validation is conducted on a Φ400 mm diameter single-crystal silicon plane mirror during the grinding stage.The measurement re-sults obtained using the proposed multi-probe system are compared with those from a coordinate measuring machine(CMM).The results indicate that the absolute deviation of the peak-to-valley(PV)value is 0.21 μm,corresponding to a relative deviation of 2.22%,while the absolute deviation of the root mean square(RMS)value is 0.14 μm,corresponding to a relative deviation of 7.78%.These results demon-strate that the proposed method maintains good measurement consistency and stability under machine tool operating conditions and provides a practical non-contact surface form measurement solution for high-preci-sion in-situ measurement during the grinding stage of optical components.关键词
光学检测/多测头/面形重构/蒙特卡罗分析/Sobol敏感度系数Key words
optical measurement/multi-probe/surface figure reconstruction/Monte Carlo analysis/So-bol sensitivity indices分类
数理科学引用本文复制引用
曲梓浩,王孝坤,蔡梦雪,戚二辉,赵映景,刘忠凯,王玉坤,薛栋林,张学军..基于多测头的反射镜面形检测[J].光学精密工程,2026,34(5):701-710,10.基金项目
国家自然科学基金资助项目(No.62127901) （No.62127901）
