光学精密工程2026，Vol.34Issue(5)：743-755,13.DOI:10.37188/OPE.20263405.0743
基于多原理融合的精密旋转轴系六自由度误差同步测量
Simultaneous measurement for six-degrees-of-freedom errors of precision rotary axis based on multi-principle fusion
摘要
Abstract
To investigate the influence of error variations in precision shaft systems on precision measuring instruments and high-end manufacturing equipment incorporating precision rotating shafts,a multi-princi-ple fusion-based synchronous measurement method for six-degree-of-freedom errors of precision rotating shaft systems is proposed.The method integrates the principles of eccentric self-calibration for circular grating installation,self-collimation,and laser triangulation.First,based on the eccentric self-calibration principle for circular grating installation,a separation model for angular positioning error and radial error in precision rotating shaft systems is established.Second,a measurement module for axial and tilt errors is designed and calibrated by combining the principles of self-collimation and laser triangulation.Finally,ex-periments conducted on a direct-drive(DD)motor demonstrate that the angular positioning error is within±3.5″,the radial error within±0.5 μm,the X-axis tilt error within±6″,the Y-axis tilt error within±8.3″,and the axial error within±6 μm.Compared with conventional measurement approaches for pre-cision rotating shaft errors,the proposed method eliminates the need for instruments such as photoelectric autocollimators or commercial spindle error measurement systems.It enables simultaneous measurement of six-degree-of-freedom errors in precision rotating shafts and offers advantages including low cost and in-situ measurement capability.The method is therefore suitable for long-term monitoring of precision rotat-ing shaft errors.关键词
激光三角原理/自准直原理/六自由度误差测量/精密旋转轴系/圆光栅安装偏心自校准Key words
laser triangulation principle/autocollimation principle/six-degrees-of-freedom error measure-ment/precision rotary axis/installation eccentricity self-calibration principle of circular grat-ing分类
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赵会宁,孙虎,张有虎,张文颖,常松涛,刘芳芳,夏豪杰..基于多原理融合的精密旋转轴系六自由度误差同步测量[J].光学精密工程,2026,34(5):743-755,13.基金项目
国家自然科学基金资助项目(No.52575621) （No.52575621）
国家重点研发计划资助项目(No.2022YFF0705702) （No.2022YFF0705702）
