光学精密工程2026，Vol.34Issue(5)：769-783,15.DOI:10.37188/OPE.20263405.0769
基于GUM-MCM的微纳米坐标测量机圆度测量不确定度评定
Uncertainty evaluation for roundness measurement on micro/nano coordinate measuring machines based on GUM-MCM
摘要
Abstract
To verify the reliability of micro/nano coordinate measuring machines(CMMs)in roundness measurement and to accurately identify key sources of measurement uncertainty,an evaluation method is established to quantitatively analyze the uncertainty and the influence of various error components on the evaluation results.First,in accordance with the Chinese national standard GB/T 7235-2004,four center calculation methods-least squares,maximum inscribed circle,minimum circumscribed circle,and mini-mum zone-are employed,and the roundness measurement uncertainty is evaluated using the GUM-MCM method.Subsequently,a Random Forest regression model is introduced to establish the relationship be-tween the errors associated with different uncertainty sources(repeatability,temperature variation,cross-talk force,and probe wear)and the resulting roundness error.By employing three evaluation metrics—out-of-bag error increase,feature elimination error increase,and stability weight—the influence of each er-ror source on the roundness error is systematically quantified.Experimental results indicate that the best estimates of roundness obtained using the four methods are 0.629,0.221,0.616,and 0.608 μm,with corresponding standard uncertainties of 0.099,0.138,0.103,and 0.094 μm,respectively;among them,the minimum zone method yields the lowest uncertainty.Random Forest analysis further reveals that the error component associated with probe wear exerts the most significant influence in the least squares,mini-mum circumscribed circle,and minimum zone methods,with total scores of 0.74,4.50,and 0.53,re-spectively.By integrating the classical GUM-MCM uncertainty evaluation framework with a Random For-est regression model,the proposed approach effectively verifies the reliability of roundness measurements performed by micro/nano CMMs while quantitatively resolving the contributions of individual uncertainty sources.These findings provide important engineering insights for improving the accuracy and reliability of measurements in ultra-precision manufacturing.关键词
微纳米坐标测量机/圆心计算/圆度/不确定度评定/随机森林Key words
micro/nano coordinate measuring machine/center calculation/roundness/uncertainty evalu-ation/random forest分类
机械制造引用本文复制引用
楼伟民,陈欢,谢嵩,杨鹏,居冰峰,陈远流,叶怀储,马丙辉..基于GUM-MCM的微纳米坐标测量机圆度测量不确定度评定[J].光学精密工程,2026,34(5):769-783,15.基金项目
浙江省市场监督管理局科技计划资助项目(No.QN2025001) （No.QN2025001）
浙江省自然科学基金资助项目(No.LQ24F050004) （No.LQ24F050004）
中国博士后科学基金资助项目(No.2024M762926) （No.2024M762926）
