光学精密工程2026，Vol.34Issue(5)：784-793,10.DOI:10.37188/OPE.20263405.0784
外延展螺旋形绝对式时栅角位移传感原理及器件
Absolute angular displacement sensing principle and sensors based on time grating with extended spiral
摘要
Abstract
To address the limitations associated with absolute coding and ultra-precision photolithography in the design and fabrication of traditional absolute angular displacement sensors,a novel time-grating-based absolute angular displacement sensing method employing an extended spiral structure is proposed.Two sets of sinusoidal and cosine excitation windings with extended spiral geometries were ar-ranged on the inner and outer rings of the stator.These windings are spatially orthogonal and possess oppo-site pole numbers.An alternating magnetic field was generated using time-orthogonal excitation signals through time-division multiplexing,effectively reducing electromagnetic crosstalk and establishing a map-ping relationship between temporal signals and spatial angular displacement.Variations in the magnetic field were detected by induction windings to obtain displacement signals,and absolute angular displace-ment was determined using a combined"positioning+measurement"strategy.Experimental results indi-cate that an absolute measurement error of±11.2″ was achieved within a full 360° range.Arcsecond-level absolute position measurement was realized using sensing units with ten-thousand-arcsecond resolution,thereby eliminating the dependence of traditional absolute displacement sensors on absolute coding and ultra-precision photolithography while significantly reducing manufacturing complexity.The proposed method is suitable for angular displacement measurement in harsh environ-ments such as those contaminated by oil,demonstrating significant academic relevance and engineering ap-plication potential.关键词
绝对角位移/时栅/外延展螺旋形/时分复用/对极数互质Key words
absolute angular displacement/time grating/extrapolation spiral shape/time division multi-plexing/coprime exponents分类
信息技术与安全科学引用本文复制引用
陈自然,张子仪,郑永海,何智颖,史立业,何志林,杨旭..外延展螺旋形绝对式时栅角位移传感原理及器件[J].光学精密工程,2026,34(5):784-793,10.基金项目
国家重点研发计划资助项目(No.2023YFB3209400) （No.2023YFB3209400）
国家自然科学基金资助项目(No.52175495,No.52475549) （No.52175495,No.52475549）
重庆市自然科学基金资助项目(No.CSTB2023NSCQ-LZX0088) （No.CSTB2023NSCQ-LZX0088）
