Femtosecond laser-induced sub-50-nm period nanogratings with ultrahigh uniformity on graphite under water immersion
Femtosecond laser-induced sub-50-nm period nanogratings with ultrahigh uniformity on graphite under water immersion
摘要
关键词
deep-subwavelength grating/femtosecond laser processing/water immersion/ultrahigh uniformity/highly oriented pyrolytic graphiteKey words
deep-subwavelength grating/femtosecond laser processing/water immersion/ultrahigh uniformity/highly oriented pyrolytic graphite引用本文复制引用
Qingyu Li,Feng Zhou,Min Huang..Femtosecond laser-induced sub-50-nm period nanogratings with ultrahigh uniformity on graphite under water immersion[J].极端制造（英文）,2026,8(1):573-600,28.基金项目
The authors are grateful to Liu Yanfa for his support in the maintenance and use of fs lasers,to Ding Cairong for her support in SEM and FIB-SEM characterization,and to Zeng Xueran for his support in MRS characteriza-tion.This work has been supported by grants from Natural Science Foundation of Guangdong Province(Grant No.2021A1515012335) （Grant No.2021A1515012335）
National Natural Science Foundation of China(NSFC)(Grant No.11274400) （NSFC）
Pearl River S&T Nova Program of Guangzhou(Grant No.201506010059) （Grant No.201506010059）
State Key Laboratory of Optoelectronic Materials and Technologies(Sun Yat-Sen University)(Grant No.OEMT-2024-ZTS-01) （Sun Yat-Sen University）
State Key Laboratory of High Field Laser Physics(Shanghai Institute of Optics and Fine Mechanics). （Shanghai Institute of Optics and Fine Mechanics）
