光学精密工程2026，Vol.34Issue(6)：928-940,13.DOI:10.37188/OPE.20263406.0928
基于比例积分谐振控制器的力平衡模式微机电陀螺的带宽拓展方法
Bandwidth expansion method for force-to-rebalance mode microelectromechanical system gyroscopes based on a proportional-integral-resonant controller
摘要
Abstract
To address the limited measurement bandwidth of Force-To-Rebalance(FTR)mode Micro-Electro-Mechanical System(MEMS)gyroscopes under modal frequency mismatch and the difficulty of si⁃multaneously maintaining adequate stability margins and bandwidth enhancement using conventional Pro⁃portional-Integral(PI)control,this study investigated the bandwidth mechanism and developed a perfor⁃mance-improvement approach.First,an equivalent unity negative-feedback frequency-domain model was established to characterize the bandwidth of FTR rate measurement,serving as a basis for controller de⁃sign and parameter tuning.On this basis,the intrinsic mechanism was clarified whereby increasing the open-loop crossover frequency under PI control was constrained and inevitably led to degradation of stabili⁃ty margins.A Proportional-Integral-Resonant(PIR)controller was then introduced;by performing target⁃ed magnitude-phase shaping around the modal frequency split,the resonant peak was suppressed and the open-loop crossover frequency was increased.Finally,the proposed method was experimentally validated on a four-mass MEMS gyroscope prototype and an angular vibration-table setup.Both simulations and ex⁃periments show that,with the PIR controller,the force-rebalance loop achieves a gain margin of 6.03 dB,a phase margin of 59.5°,and an open-loop crossover frequency of 25.1 Hz,corresponding to an increased measurement bandwidth of 125 Hz.Compared with the PI-controlled bandwidth of approximately 35 Hz,this represents an enhancement by a factor of about 3.5,accompanied by a flatter in-band magnitude re⁃sponse and a markedly improved dynamic response capability.The scale-factor and bias-related metrics re⁃main essentially unchanged.By introducing resonant shaping around the modal frequency split,the PIR controller effectively overcomes the bandwidth bottleneck inherent to PI control,enabling a substantial ex⁃pansion of FTR measurement bandwidth while preserving reasonable stability margins and static perfor⁃mance.The proposed approach provides a practical engineering reference for wideband dynamic measure⁃ment and operation under complex conditions.关键词
微机电陀螺/力平衡模式/比例积分谐振控制器/带宽拓展/幅频特性Key words
MEMS gyroscope/force-to-rebalance mode/proportional-integral-resonant controller/band⁃width expansion/magnitude-frequency characteristics分类
信息技术与安全科学引用本文复制引用
高阳,贾佳,孟琳,阮志虎,曹慧亮..基于比例积分谐振控制器的力平衡模式微机电陀螺的带宽拓展方法[J].光学精密工程,2026,34(6):928-940,13.基金项目
重庆市科技创新重大研发项目基金项目(No.CSTB2025TIAD-STX0016) （No.CSTB2025TIAD-STX0016）
国家重点研发计划"智能传感器"重点专项(No.2022YFB3205000) （No.2022YFB3205000）
国家自然基金(No.52475586,No.U2230206) （No.52475586,No.U2230206）
江苏省高等学校基础科学(自然科学)研究项目(No.24KJB510007) （自然科学）
南京工程学院创新基金面上项目(No.CKJB202306) （No.CKJB202306）
南京工程学院创新基金重大项目(No.CKJA202307) （No.CKJA202307）
