舰船电子工程2026，Vol.46Issue(1)：147-151,5.DOI:10.3969/j.issn.1672-9730.2026.01.029
一种方形结构CMUT阵列的设计制备与性能研究
Design,Preparation and Performance Study of a Square Structure CMUT Array
摘要
Abstract
This study successfully fabricated a square precision CMUT array element with dimensions of 1.85 mm×1.15 mm and integrated 560 micro-element structures using the sacrificial layer release process.The performance of this array element is thor-oughly characterized using a standard piezoelectric transducer.Experimental results reveal favourable performance in both transmit voltage response and receive sensitivity,ensuring efficient transmission and reception capabilities.In terms of directivity,the trans-mit and receive directivities exhibited high consistency,with a main beam width of 5°and maximum sidelobe intensities of-13.98 dB and-13.70 dB,respectively,demonstrating its superior directivity characteristics.Additionally,the array element exhibited ex-cellent linearity with a transmit nonlinearity of 1.16%and a receive nonlinearity of 1.64%.This research holds promise for applica-tions in ultrasonic imaging,medical diagnosis,and other related fields,providing valuable support for the further development of relevant technologies.关键词
电容式微机械超声换能器(CMUT)/灵敏度/指向性/线性度Key words
capacitive micromechanical ultrasonic transducer(CMUT)/sensitivity/directivity/linearity分类
通用工业技术引用本文复制引用
梁永,张国军,王任鑫,崔建功,杨玉华,何常德,张文栋,贾利成..一种方形结构CMUT阵列的设计制备与性能研究[J].舰船电子工程,2026,46(1):147-151,5.基金项目
国家自然科学基金项目(编号:61927807,62304208,62320106011) （编号:61927807,62304208,62320106011）
中国博士后科学基金项目(编号:2023M733277) （编号:2023M733277）
山西省青年科学基金项目(编号:202203021222025)资助. （编号:202203021222025）
