太赫兹科学与电子信息学报2026，Vol.24Issue(2)：196-205,10.DOI:10.11805/TKYDA2025246
扫频连续波太赫兹近场成像系统
Swept-frequency continuous wave terahertz near-field imaging system
摘要
Abstract
Limited by the diffraction limit,the theoretical limit of spatial imaging resolution for far-field terahertz imaging technology is half the wavelength,which fails to meet the testing requirements for the characterization of microscale information in materials.To address the application needs of micro-nano defect detection in new materials such as semiconductor materials and ordered structural materials,this paper designs a wide-bandwidth frequency-swept continuous-wave terahertz near-field imaging system.The system adopts an all-electronic integrated terahertz transceiver module,and through terahertz beam spatial synthesis,it achieves seamless coverage of the test frequency range from 0.11 to 1.10 THz with a frequency resolution of 1 Hz.Via multi-frequency point information fusion,micro-nano defect detection and identification in materials are realized,with a spatial imaging resolution of ≤100 nm,the imaging field of view reaches 100 μm × 100 μm.Tests and characterizations on semiconductor materials and ordered structural materials verify that the system in this paper can obtain high-quality near-field images by selecting terahertz frequency points at which the test materials exhibit strong responses to the high-resolution frequency-swept continuous wave.关键词
太赫兹/空间成像分辨率/扫频连续波Key words
terahertz/spatial imaging resolution/swept-frequency continuous wave分类
信息技术与安全科学引用本文复制引用
梁晓林,王慧敏,王琦,石先宝,年夫顺,杨锦鹏,姜万顺,邓建钦,陆柏涛..扫频连续波太赫兹近场成像系统[J].太赫兹科学与电子信息学报,2026,24(2):196-205,10.基金项目
国家重点研发计划资助项目(2023YFF0715002) （2023YFF0715002）
青岛市关键技术攻关及产业化示范类资助项目(23-1-2-qljh-5-gx) （23-1-2-qljh-5-gx）
