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利用离焦诱导的弥散圆进行镜面颗粒尺寸测量

路洪腾 宫平 卢鑫磊 韶莉霞 马辰昊

中国光学(中英文)2026,Vol.19Issue(1):39-48,10.
中国光学(中英文)2026,Vol.19Issue(1):39-48,10.DOI:10.37188/CO.2025-0108

利用离焦诱导的弥散圆进行镜面颗粒尺寸测量

Using defocus-induced circle of confusion for particle size measurement of the dust on mirrors

路洪腾 1宫平 1卢鑫磊 1韶莉霞 1马辰昊1

作者信息

  • 1. 长春理工大学光电工程学院,吉林长春 130022
  • 折叠

摘要

Abstract

Optical surface particulate contamination detection is critical to maintaining the imaging perform-ance of space telescopes.Conventional approaches typically employ dark-field scattering microscopy to cap-ture particle images,where particle size is estimated from the circumcircle of the particle's contour.However,this method requires precise focusing during image acquisition and is prone to large errors when dealing with irregularly shaped particles.To address these limitations,this paper introduces a novel sizing method based on defocus-induced blur circles.By exploiting the relationship between particle size and its scattered light energy,the defocused dark-field scattering image of a particle is transformed into a blur circle,whose properties can be analyzed to determine the actual particle size.Unlike conventional contour-based measurements,the blur-circle approach is inherently less sensitive to particle shape irregularities and system defocus.Experimental validation demonstrates that the proposed method achieves high sizing accuracy across varying defocus distances.Compared with traditional dark-field scattering microscopy,the average measurement error for irregularly shaped particles is significantly reduced from 58%to 10.3%.These results confirm both the feasibility and effectiveness of the blur circle method in improving measurement precision for irregular particulate contaminants.

关键词

颗粒检测/暗场散射/点扩散函数/Mie散射

Key words

particle detection/dark-field scattering/point spread function/Mie scattering

分类

数理科学

引用本文复制引用

路洪腾,宫平,卢鑫磊,韶莉霞,马辰昊..利用离焦诱导的弥散圆进行镜面颗粒尺寸测量[J].中国光学(中英文),2026,19(1):39-48,10.

基金项目

吉林省科技发展计划项目(No.20240404052ZP)Supported by Jilin Provincial Scientific and Technological Development Program(No.20240404052ZP) (No.20240404052ZP)

中国光学(中英文)

2095-1531

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