中国光学（中英文）2026，Vol.19Issue(2)：251-257,7.DOI:10.37188/CO.2025-0113
射频波导CO2激光放大技术
CO2 laser amplification technology based on RF waveguide
摘要
Abstract
Toward the application demand for high-power,high-beam-quality CO2 seed lasers in extreme ul-traviolet lithography light sources,the CO2 laser amplification technology were investigated based on a radio-frequency(RF)waveguide architecture.On one hand,The static insertion loss and output beam quality of the RF waveguide amplifier were measured as a function of incident beam parameters and the optimal mode-matching parameters were determined.On the other hand,a numerical model of the multi-stage RF wave-guide amplification was developed to evaluate the effects of the gas pressure and the discharge pumping power on the amplification factor.The technology of regulating with gain medium was implemented to op-timize the amplification performance in the experiment.The experimental results indicate that the optimal mode-matching conditions were identified with a waveguide length of 2.5 m,yielding a transmission effi-ciency of 91.4％.The beam quality factors of the output beam in the horizontal and vertical directions were 1.03 and 1.05,respectively.An overall amplification factor of 68×was achieved in a dual-stage RF wave-guide amplifier.The system delivered CO2 laser emission with a repetition rate of 50 kHz,a pulse duration of 20 ns,and an average output power of 17.1 W,satisfying the design criteria and demonstrating its suitability for high-power,high-beam-quality seed laser applications.关键词
CO2激光/主振荡功率放大/模式匹配/增益介质调控Key words
CO2 laser/master oscillator power amplifier/mode-matching/gain medium regulation分类
信息技术与安全科学引用本文复制引用
董祝君,张冉冉,周益平,曾文彬,赵崇霄,黄盼,郭劲,陈飞,潘其坤..射频波导CO2激光放大技术[J].中国光学（中英文）,2026,19(2):251-257,7.基金项目
国家自然科学基金(No.62405313,No.62335016,No.12305222) （No.62405313,No.62335016,No.12305222）
中国科学院战略先导科技专项(No.XDA 0380200) （No.XDA 0380200）
中国科学院青年创新促进会(No.2021216)Supported by National Natural Science Foundation of China(No.62405313,No.62335016,No.12305222) （No.2021216）
The Strategic Priority Research Program of the Chinese Academy of Sciences(No.XDA 0380200) （No.XDA 0380200）
Youth In-novation Promotion Association,CAS(No.2021216) （No.2021216）
