中国光学（中英文）2026，Vol.19Issue(2)：258-266,9.DOI:10.37188/CO.2025-0121
薄膜铌酸锂微环高精度微波光子温度传感器
High-precision microwave photonic temperature sensor using thin-film lithium niobate micro-ring
摘要
Abstract
This paper presents a high-precision temperature sensor based on a high-quality factor thin-film lithium niobate microring resonator integrated with a microwave photonic readout system.The microring res-onator,with a narrow linewidth of 2.87 pm and a high Q-factor of 105,functions simultaneously as the tem-perature-sensing element and the core signal processing component of a microwave photonic filter.Through the thermo-optic effect,temperature variations are converted into shifts in the optical resonance wavelength,which are innovatively mapped to linear changes in the passband center frequency of the microwave photon-ic filter.A vector network analyzer is employed to accurately detect the microwave frequency response,en-abling temperature measurement via high-resolution frequency variations and establishing a quantitative model between temperature and frequency shift.In contrast to conventional methods that directly detect op-tical wavelength shifts,the proposed microwave photonic readout technique linearly converts minute reson-ance wavelength shifts into changes in the microwave center frequency,thereby overcoming the resolution limitations inherent in conventional optical spectrum analyzers.Experimental results demonstrate a sensitiv-ity of 27 MHz/℃ and a resolution of 0.002 ℃,with excellent linearity maintained under temperature vari-ations as small as 0.01 ℃.This work effectively resolves the trade-off between sensitivity and resolution in traditional optical temperature sensing,offering a novel solution for on-chip integrated high-precision tem-perature monitoring.关键词
微环谐振器/温度传感/薄膜铌酸锂/微波光子Key words
micro-ring resonator/temperature sensor/thin film lithium niobate/microwave photons分类
信息技术与安全科学引用本文复制引用
王慧婕,常祺伟,游亚军,杨绪磊,贺文君,何剑,刘毅,丑修建..薄膜铌酸锂微环高精度微波光子温度传感器[J].中国光学（中英文）,2026,19(2):258-266,9.基金项目
国家自然科学基金(No.U23A20639,No.U2341210,No.62401524,No.62371426) （No.U23A20639,No.U2341210,No.62401524,No.62371426）
广东省基础与应用基础研究基金委员会(No.2023A1515110148)Supported by National Natural Science Foundation of China(No.U23A20639,No.U2341210,No.62401524,No.62371426) （No.2023A1515110148）
Basic and Applied Basic Research Foundation of Guangdong Province(No.2023A1515110148) （No.2023A1515110148）
