硅基能谷光子晶体马赫曾德热光调制器
Silicon valley photonic crystal Mach-Zehnder thermo-optic modulator
摘要
Abstract
Thermo-optic modulators are key components of optical communication systems,and their performance di‐rectly affects system efficiency.With the development of silicon optothermonic technology,silicon thermo-optic modu‐lators have been widely used in optothermonic chips.Conventional silicon optical modulators are large in size and have high losses.In recent years,researchers have proposed to use the slow light effect of photonic crystals to reduce the footprint of modulators.Related studies have shown that these devices have advantages,such as small size and low driv‐ing voltage.However,the optical transmittance of thermo-optic modulators based on photonic crystals is still affected by defects caused by fabrication errors.Valley photonic crystal optical waveguides can achieve scattering-immune high-efficiency unidirectional transmission,providing a new venue for realizing high-performance photonic devices.In this paper,a new silicon thermo-optic modulator based on a valley photonic crystal Mach-Zehnder interferometer(MZI)is designed.The electrical heating mechanism is introduced on one of the waveguides of the MZI.The thermo-optic effect modulates the refractive index to achieve precise phase modulation of the transmitted light.The thermo-optic modulator device has a small footprint of only 9.26 μm×7.99 μm,which can achieve a high forward transmittance of 0.91,an insertion loss of 0.41 dB,and a modulation contrast of 11.75 dB.It can also be experimentally fabricated using comple‐mentary metal oxide semiconductor(CMOS)technology,so it will have broad application prospects.This modulation principle can be widely used in designing different thermo-optic modulation devices.关键词
硅基光子学/能谷光子晶体/马赫曾德干涉仪/热光调制器/热光效应Key words
silicon photonics/valley photonic crystal/Mach-Zehnder interferometer/thermo-optic modulator/thermo-optical effect分类
数理科学引用本文复制引用
张昕妍,林瀚,费宏明..硅基能谷光子晶体马赫曾德热光调制器[J].红外与毫米波学报,2026,45(1):116-124,9.基金项目
国家自然科学基金委联合基金(U23A20375),山西省自然科学基金面上项目(202403021211011),量子光学与光量子器件国家重点实验室开放课题(KF202402),山西省重点研发计划项目(2023021501010001),基础科研条件与重大科学仪器设备研发(2023YFF0715700),山西省回国留学人员科研教研资助项目(2024-032),山西省留学回国人员科技活动择优资助项目(20240006) Supported by the Basic scientific research conditions and major scientific instrument and equipment development of Anhui Science and Technology Department(U23A20375),the Natural Science Foundation of Shanxi(2024030212110110),the Project supported by the Program of State Key Laboratory of Quantum Optics and Quantum Optics Devices(KF202402),the Key Research project of Shanxi Province(2023021501010001),the Basic scientific research conditions and major scientific instrument and equipment development of Anhui Science and Tech-nology Department(2023YFF0715700),the Research project Supported by Shanxi Scholarship Council of China(2024-032),the Fund Program for the Scientific Activities of Selected Returned Overseas Professionals in Shanxi Province(20240006) （U23A20375）
