红外与毫米波学报2026，Vol.45Issue(1)：157-165,9.DOI:10.11972/j.issn.1001-9014.2026.01.017
基于锗薄膜速率调制沉积的红外滤光片性能提升方法
A method for enhancing the performance of infrared filters based on rate-modulated deposition of germanium films
摘要
Abstract
This study systematically investigated the influence of deposition rate on the structure,broadband opti-cal properties(1.0-13.0 µm),and stress characteristics of Germanium(Ge)films.Additionally,a method for enhancing the performance of infrared filters based on rate-modulated deposition of Ge films was proposed.The optical absorption of Ge films in the short-wave infrared(SWIR)and long-wave infrared(LWIR)bands can be effectively reduced by modulating the deposition rate.As the deposition rate increases,the Ge films maintain an amorphous structure.The optical constants of the films in the 1.0-2.5 µm and 2.5-13.0 µm bands were precisely determined using the Cody-Lorentz model and the classical Lorentz oscillator model,respectively.Notably,high-er deposition rates result in a gradual increase in the refractive index.The extinction coefficient increases with the deposition rate in the SWIR region,attributed to the widening of the Urbach tail,while it decreases in the LWIR region due to the reduced absorption caused by the Ge-O stretching mode.Additionally,the films exhibit a tensile stress that decreases with increasing deposition rate.Finally,the effectiveness of the proposed fabrication method for an infrared filter with Ge films deposited at an optimized rate was demonstrated through practical examples.This work provides theoretical and technical support for the application of Ge films in high-performance infrared filters.关键词
光学薄膜/锗薄膜/光学吸收/红外滤光片Key words
optical coatings/germanium film/optical absorption/infrared filter引用本文复制引用
刘保剑,郑玉祥,李大琪,段微波,余德明,蔡清元,于天燕,蒋林,杨雨婷,庄秋慧..基于锗薄膜速率调制沉积的红外滤光片性能提升方法[J].红外与毫米波学报,2026,45(1):157-165,9.基金项目
Supported by the National Natural Science Foundation of China(62275053,62275256),the National key Research and Development Program of China(2021YFB3701500),the Youth Innovation Promotion Association of the Chinese Academy of Sciences(2023248),the Eastern Talent Plan Youth Project 2022,the Shanghai Key Laboratory of Optical Coatings and Spectral Modulation(23dz2260500). （62275053,62275256）
