人工晶体学报2026，Vol.55Issue(3)：359-367,9.DOI:10.16553/j.cnki.issn1000-985x.2025.0217
直径150mm碲锌镉晶体生长温场控制研究
Temperature Field Control for the Growth of 150 mm Diameter CZT Crystals
曹聪 1刘江高 1折伟林 1范叶霞 1马启司 1李振兴1
作者信息
摘要
Abstract
Cadmium zinc telluride(CZT)is a crucial material in the fields of infrared detection and nuclear radiation detection,garnering significant attention as a foundational material for manufacturing next-generation ultra-large array detectors.To address the technical challenges in growing 150 mm diameter CZT crystals via the Vertical gradient freeze(VGF)method,finite element simulation was employed to regulate the heater output power during the crystal growth process.This approach enabled precise control over the temperature field during CZT crystal growth,achieving a convex solid-liquid interface shape throughout the entire growth process.Consequently,high-quality 150 mm diameter CZT single crystals were successfully grown.The grown crystals enabled the preparation of 100 mm×100 mm infrared CZT substrates.Test results demonstrate uniform composition distribution in the CZT crystals.The full width at half maximum(FWHM)of the rocking curve for the(111)plane of the CZT substrates is below 15″,and the average etch pit density(EPD)is less than 1×104 cm-2.关键词
碲锌镉晶体/垂直梯度凝固法/有限元模拟/界面形状控制/组分均匀性/晶体缺陷Key words
CdZnTe crystal/vertical gradient freeze method/finite element simulation/interface shape control/composition uniformity/crystal defect分类
数理科学引用本文复制引用
曹聪,刘江高,折伟林,范叶霞,马启司,李振兴..直径150mm碲锌镉晶体生长温场控制研究[J].人工晶体学报,2026,55(3):359-367,9.
