硅酸盐通报2026，Vol.45Issue(3)：771-780,812,11.DOI:10.16552/j.cnki.issn1001-1625.2025.1194
合成石英玻璃粘度特征多尺度模拟研究进展
Research Progress on Multiscale Simulation of Viscosity Characteristics of Synthetic Quartz Glass
摘要
Abstract
In the manufacturing process of integrated circuits,thermal treatment process is one of the critical steps,and the quartz furnace tube,as a core component of thermal treatment equipment,its performance directly impacts the quality and production efficiency of integrated circuits.Synthetic quartz glass,as a key material for quartz furnace tubes,relies heavily on precise control of its high-temperature preparation and forming processes,which are intrinsically linked to viscosity characteristic changes involving the relaxation of microstructures and macroscopic flow behavior.Therefore,this paper systematically reviews multiscale simulation strategies and recent advancements in quartz glass viscosity research.At the microscopic scale,it focuses on evaluating key potential functions used in molecular dynamics(MD)simulations and their predictive accuracy,summarizing the accuracy and limitations of commonly used potential functions in predicting the structure,diffusion coefficients,and viscosity of the silican dioxide system,while reviewing the relevant achievements of influence mechanisms of impurities such as alkali metal ions and hydroxyl groups on synthetic quartz glass viscosity and structural relaxation through molecular dynamics simulations.At the macroscopic scale,it organizes simulation studies based on finite element method(FEM)and computational fluid dynamics(CFD),analyzing the current status of incorporating viscosity models obtained from microscopic simulations or experiments into simulation software for thermal processing simulations.This paper provides a reference for future research on impurity diffusion laws and high-temperature resistance characteristics in synthetic quartz glass,and offers a theoretical foundation and technical support for high-temperature applications of quartz glass materials.关键词
合成石英玻璃/粘度/多尺度模拟/分子动力学/有限元法/计算流体动力学Key words
synthetic quartz glass/viscosity/multiscale simulation/molecular dynamics/finite element method/computational fluid dynamics分类
化学化工引用本文复制引用
周建欣,聂兰舰,范江伟,贾亚男,刘瑞旺..合成石英玻璃粘度特征多尺度模拟研究进展[J].硅酸盐通报,2026,45(3):771-780,812,11.基金项目
北京市自然科学基金(L248098) （L248098）
