光通信技术2026，Vol.50Issue(2)：54-60,7.DOI:10.13921/j.cnki.issn1002-5561.2026.02.009
基于数字相位校正的双波长数字全息台阶高度测量
Dual-wavelength digital holographic step height measurement based on digital phase correction
摘要
Abstract
In order to solve 2π phase ambiguity in measuring the step height on material surfaces and overall tilt errors caused by off-axis holographic spectrum frequency shift,a dual-wavelength digital holographic measurement technique based on digi-tal phase correction is proposed.This technique uses dual-wavelength laser illumination to obtain holograms,employs digital filtering to extract the phase,and performs overall phase correction through plane fitting,effectively eliminating tilt errors caused by discontinuous spectrum frequency shifts.Simulation and experimental results show that after tilt correction,the rela-tive errors in the y-direction and x-direction are reduced to 1/8.4 and 1/12.2 of their pre-correction values,respectively.关键词
台阶高度/双波长数字全息/平面拟合/整体倾斜Key words
step height/dual-wavelength digital holographic/plane fitting/overall tilt分类
信息技术与安全科学引用本文复制引用
屈玲,李常伟,吴婧,陆彦婷..基于数字相位校正的双波长数字全息台阶高度测量[J].光通信技术,2026,50(2):54-60,7.基金项目
国家自然科学基金项目(11873069)资助 （11873069）
中国科学院青年创新促进会项目(2019064)资助. （2019064）
