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A novel fabrication approach for high-aspect-ratio slow wave structures combining water film-assisted laser pre-channeling and micro-milling

Xueqiang WU Zhentong MA Yu WANG Xiguang LI Chang LIU Mingjun CHEN Qi LIU Chunya WU

中国航空学报（英文版）2026，Vol.39Issue(4)：714-727,14.

中国航空学报（英文版）2026，Vol.39Issue(4)：714-727,14.DOI:10.1016/j.cja.2025.103701

A novel fabrication approach for high-aspect-ratio slow wave structures combining water film-assisted laser pre-channeling and micro-milling

Xueqiang WU ¹Zhentong MA ¹Yu WANG ¹Xiguang LI ¹Chang LIU ¹Mingjun CHEN ²Qi LIU ³Chunya WU²

作者信息

1. School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China
2. School of Mechatronics Engineering,Harbin Institute of Technology,Harbin 150001,China||State Key Laboratory of Robotics and System,Harbin Institute of Technology,Harbin 150080,China
3. Department of Mechanical Engineering,University of Bath,Bath BA2 7AY,United Kingdom
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摘要

关键词

High-aspect-ratio microstructure/Micro-milling/Slow wave structure/Tool wear/Water film-assisted laser processing

Key words

High-aspect-ratio microstructure/Micro-milling/Slow wave structure/Tool wear/Water film-assisted laser processing

引用本文复制引用

Xueqiang WU,Zhentong MA,Yu WANG,Xiguang LI,Chang LIU,Mingjun CHEN,Qi LIU,Chunya WU..A novel fabrication approach for high-aspect-ratio slow wave structures combining water film-assisted laser pre-channeling and micro-milling[J].中国航空学报（英文版）,2026,39(4):714-727,14.

基金项目

This work was supported by National Key Research and Development Program of China(No.2024YFB4609503),National Natural Science Foundation of China(No.52075128),Open Project from the State Key Laboratory of Robotics and Systems,China(HIT,SKLRS-2025-KF-09)and the"Young Scientist Workshops"of Harbin Institute of Technology,China(Category B). （No.2024YFB4609503）

中国航空学报（英文版）

ISSN：1000-9361

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