舰船电子工程2026，Vol.46Issue(2)：184-188,5.DOI:10.3969/j.issn.1672-9730.2026.02.036
面向水下超声成像的CMUT线性阵列
CMUT Linear Array for Underwater Ultrasound Imaging
摘要
Abstract
In this paper,a 1×32 linear capacitive micromechanical ultrasonic transducer(CMUT)array with a center frequen-cy of 3.5 MHz is successfully developed,and its emission and receiving performance are comprehensively evaluated.The experimen-tal results show that the CMUT array show exponential decay characteristics along the axial sound pressure,with excellent emission linearity and nonlinearity of only 3.19%.Directivity analysis shows that the-6 dB main lobe width is only 4°,and the maximum lat-eral lobe level is-14.7 dB,which effectively reduces the lateral lobe level,thus significantly improving the anti-interference ability and signal-to-noise ratio,and provides a strong guarantee for high-definition imaging.In terms of reception sensitivity,the array achieves the high sensitivity of-207.67 dB and-207.93 dB at 3.3 MHz and 3.4 MHz,respectively.The-3 dB band width is 104.89%,and the working band widens to 1.448 MHz to 4.968 MHz,demonstrating its stability and applicability over a wide fre-quency range.Moreover,the imaging effect of this CMUT array is verified by performing 2D imaging test of the aluminum section at 25 mm.In conclusion,the developed 1×32 linear CMUT array has excellent acoustic performance and has great potential for applica-tion in the field of high-resolution biomedical ultrasound imaging.关键词
电容式微机械超声换能器(CMUT)/声学测试/线性阵列/超声成像Key words
capacitive micromechanical ultrasound transducer(CMUT)/acoustic testing/linear array/ultrasound imaging分类
通用工业技术引用本文复制引用
王靖文,王任鑫,张国军,王智豪,刘书睿,曾祥铖,赵晨雅,梁永,杨玉华..面向水下超声成像的CMUT线性阵列[J].舰船电子工程,2026,46(2):184-188,5.基金项目
国家重点研究计划(编号:2020YFC0122102) （编号:2020YFC0122102）
国家自然科学基金项目(编号:61927807,52275578) （编号:61927807,52275578）
山西省基金委研究计划(编号:20210302123027,20210302124203)资助. （编号:20210302123027,20210302124203）
