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Synthesis of functional chalcogenide materials for memory/sensing devices and their integration into artificial sensory systems

Pengfei Liu Taeyong Eom Sungjin Park In Soo Kim Jae Won Heo Hyeonmin Bong Jinsik Choe Huiyoung Lee Won-Kyu Lee Myung-Gil Kim Donghee Son Joohoon Kang

极端制造（英文）2026，Vol.8Issue(2)：97-138,42.

极端制造（英文）2026，Vol.8Issue(2)：97-138,42.DOI:10.1088/2631-7990/ae1db9

Synthesis of functional chalcogenide materials for memory/sensing devices and their integration into artificial sensory systems

Pengfei Liu ¹Taeyong Eom ²Sungjin Park ³In Soo Kim ⁴Jae Won Heo ⁵Hyeonmin Bong ⁶Jinsik Choe ³Huiyoung Lee ⁶Won-Kyu Lee ⁷Myung-Gil Kim ⁵Donghee Son ⁸Joohoon Kang⁹

作者信息

1. Nanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea
2. Department of Semiconductor System Engineering,Sejong University,Seoul 05006,Republic of Korea
3. Icheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of Korea
4. Nanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||School of Advanced Materials Science and Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Center for Nanoscale Materials,Argonne National Laboratory,Lemont,IL 60439,United States of America
5. Nanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||School of Advanced Materials Science and Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea
6. Icheon Branch,Korea Institute of Ceramic Engineering and Technology,Icheon 17303,Republic of Korea||Department of Physics,Yonsei University,Seoul 03722,Republic of Korea
7. Department of Materials Science and Engineering,Hongik University,Seoul 04066,Republic of Korea
8. Nanophotonics Research Center,Korea Institute of Science and Technology,Seoul 02792,Republic of Korea||KIST-SKKU Carbon-Neutral Research Center,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Department of Electrical and Computer Engineering,Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea||Center for Neuroscience Imaging Research,Institute for Basic Science(IBS),Sungkyunkwan University(SKKU),Suwon 16419,Republic of Korea
9. Department of Chemical and Biomolecular Engineering,Yonsei University,Seoul 03722,Republic of Korea
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摘要

关键词

functional chalcogenides/materials synthesis/device integration/artificial sensory system/phase-change memory/sensing modalities

Key words

functional chalcogenides/materials synthesis/device integration/artificial sensory system/phase-change memory/sensing modalities

引用本文复制引用

Pengfei Liu,Taeyong Eom,Sungjin Park,In Soo Kim,Jae Won Heo,Hyeonmin Bong,Jinsik Choe,Huiyoung Lee,Won-Kyu Lee,Myung-Gil Kim,Donghee Son,Joohoon Kang..Synthesis of functional chalcogenide materials for memory/sensing devices and their integration into artificial sensory systems[J].极端制造（英文）,2026,8(2):97-138,42.

基金项目

This work was supported by the National Research Foundation of Korea(NRF)grant funded by the Korean government(MSIT)(RS-2024-00358623),the Technology Innovation Program(or Industrial Strategic Technology Development Program-Development of Next Generation Intelligent Semiconductors)(20025643,Development of intelligent physical vapor deposition equipment for hard mask applic-ations with high selectivity)funded By the Ministry of Trade,Industry & Energy(MOTIE,Korea),and KIST intramural Grants(2V10250 and 2E33221).T.E.acknowledges support from the faculty research fund of Sejong University in 2024.W.-K.L.was supported by 2024 Hongik University Research Fund.Parts of elements in Figures 1 and 14 were generated using Open AI's generative AI tool(DALL·E)based on author-provided descriptions. （NRF）

极端制造（英文）

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