极端制造（英文）2026，Vol.8Issue(2)：352-390,39.DOI:10.1088/2631-7990/ae2578
Scalable and reproducible sub-5 nm manufacturing for next-generation devices
Scalable and reproducible sub-5 nm manufacturing for next-generation devices
Lijuan Chen 1Xiangming Li 2Fenggang Ren 3Yi Lv 3Stefan A Maier 4Jinyou Shao 5Sihai Luo 1Dongxu Yang 6Qi Yuan 1Yingfang Zhang 1Bai Sun 1Jian Lv 1Xiaoliang Chen 5Hongmiao Tian2
作者信息
- 1. Department of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China
- 2. Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China
- 3. Department of hepatobiliary surgery,the First Affiliated Hospital of Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China
- 4. School of Physics and Astronomy,Monash University,Clayton,Victoria,Australia
- 5. Frontier Institute of Science and Technology(FIST),Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Micro-and Nano-technology Research Center,State Key Laboratory for Manufacturing Systems Engineering,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China||Interdisciplinary Research Center of Frontier science and technology,Xi'an Jiaotong University,Xi'an,Shaanxi 710049,People's Republic of China
- 6. Chinese Academy of Science,Institute of Optics and Electronics,PO Box 350,Chengdu,Sichuan 610209,People's Republic of China
- 折叠
摘要
关键词
sub-5 nm/lithography/devices/nanofabrication/nanostructuresKey words
sub-5 nm/lithography/devices/nanofabrication/nanostructures引用本文复制引用
Lijuan Chen,Xiangming Li,Fenggang Ren,Yi Lv,Stefan A Maier,Jinyou Shao,Sihai Luo,Dongxu Yang,Qi Yuan,Yingfang Zhang,Bai Sun,Jian Lv,Xiaoliang Chen,Hongmiao Tian..Scalable and reproducible sub-5 nm manufacturing for next-generation devices[J].极端制造（英文）,2026,8(2):352-390,39.基金项目
This work was supported by the National Natural Science Foundation of China(Nos.52025055,52405627,52375576,52375575),the Key Research and Development Program of Shaanxi(Program.No.2022GXLH-01-12),the Sichuan Science and Technology Program(2023NSFSC0461),the Fundamental Research Funds for Xi'an Jiaotong University(No.xtr072024039). （Nos.52025055,52405627,52375576,52375575）
