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Laser-induced broad-spectrum strong absorption multiscale carbon-based nanofilms for photonic debonding based on the spatial confinement effect

Huijuan Liu Yanlei Hu Fangcheng Wang Qiang Liu Chenghao Ma Mingqi Huang Guoping Zhang Rong Sun

极端制造（英文）2026，Vol.8Issue(2)：510-527,18.

极端制造（英文）2026，Vol.8Issue(2)：510-527,18.DOI:10.1088/2631-7990/ae1db8

Laser-induced broad-spectrum strong absorption multiscale carbon-based nanofilms for photonic debonding based on the spatial confinement effect

Huijuan Liu ¹Yanlei Hu ²Fangcheng Wang ³Qiang Liu ³Chenghao Ma ¹Mingqi Huang ⁴Guoping Zhang ³Rong Sun³

作者信息

1. Shenzhen Institute of Advanced Electronic Materials,Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055,People's Republic of China||Department of Nano Science and Technology Institute,University of Science and Technology of China,Suzhou 215123,People's Republic of China
2. Department of Nano Science and Technology Institute,University of Science and Technology of China,Suzhou 215123,People's Republic of China
3. Shenzhen Institute of Advanced Electronic Materials,Shenzhen Institutes of Advanced Technology,Chinese Academy of Sciences,Shenzhen 518055,People's Republic of China
4. Shenzhen Samcien Semiconductor Materials Co.,Ltd,Shenzhen 518103,People's Republic of China
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摘要

关键词

photonic debonding/broad-spectrum absorption/multiscale nanostructure/spatial confinement effect/advanced packaging

Key words

photonic debonding/broad-spectrum absorption/multiscale nanostructure/spatial confinement effect/advanced packaging

引用本文复制引用

Huijuan Liu,Yanlei Hu,Fangcheng Wang,Qiang Liu,Chenghao Ma,Mingqi Huang,Guoping Zhang,Rong Sun..Laser-induced broad-spectrum strong absorption multiscale carbon-based nanofilms for photonic debonding based on the spatial confinement effect[J].极端制造（英文）,2026,8(2):510-527,18.

基金项目

The authors acknowledge the financial support from the National Natural Science Foundation of China(62574139,62174170),the Natural Science Foundation of Guangdong Province(2024A1515010123),the Strategic Priority Research Program of the Chinese Academy of Sciences(XDB0670000)and the Shenzhen Science and Technology Program(KJZD20230923114708018,KJZD20230923114710022). （62574139,62174170）

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