摘要
Abstract
Indium tin oxide(ITO)targets are crucial for depositing transparent conductive films,yet their fabrication often faces challenges such as cracking and density inhomogeneity,especially in large-sized green bodies.Gel-casting technology,with its advantages of in-situ solidification of high-solid-content slurries,high green body strength,and uniform structure,is suitable for the preparation of high-performance ITO targets.However,cracking during drying remains a critical issue in the methacrylamide(MAM)system.The effects of monomer/crosslinker ratio,slurry solid loading,and gelation temperature on the cracking behavior of ITO green bodies are systematically investigated.The results indicate that crack-free ITO green bodies with uniform microstructure can be achieved under the optimized conditions:monomer content of 1％,monomer/crosslinker ratio of 20,solid loading of 80％,and gelation temperature between 55 ℃ and 65℃.This work provides a reliable gel-casting strategy for fabricating high-quality ITO targets.关键词
胶态成型/ITO靶材坯体/单体/交联剂Key words
gel-casting/ITO green body/monomer/cross-linker分类
化学化工
